JPS61172086U - - Google Patents

Info

Publication number
JPS61172086U
JPS61172086U JP5442785U JP5442785U JPS61172086U JP S61172086 U JPS61172086 U JP S61172086U JP 5442785 U JP5442785 U JP 5442785U JP 5442785 U JP5442785 U JP 5442785U JP S61172086 U JPS61172086 U JP S61172086U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
storage container
wafer storage
filtration filter
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5442785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249721Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5442785U priority Critical patent/JPH0249721Y2/ja
Publication of JPS61172086U publication Critical patent/JPS61172086U/ja
Application granted granted Critical
Publication of JPH0249721Y2 publication Critical patent/JPH0249721Y2/ja
Expired legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP5442785U 1985-04-12 1985-04-12 Expired JPH0249721Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5442785U JPH0249721Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5442785U JPH0249721Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Publications (2)

Publication Number Publication Date
JPS61172086U true JPS61172086U (enrdf_load_stackoverflow) 1986-10-25
JPH0249721Y2 JPH0249721Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=30576176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5442785U Expired JPH0249721Y2 (enrdf_load_stackoverflow) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPH0249721Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6032802A (en) * 1995-11-16 2000-03-07 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with filter means

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6032802A (en) * 1995-11-16 2000-03-07 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with filter means
US6105781A (en) * 1995-11-16 2000-08-22 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with unitary porous gasket

Also Published As

Publication number Publication date
JPH0249721Y2 (enrdf_load_stackoverflow) 1990-12-27

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