JPS61196536U - - Google Patents

Info

Publication number
JPS61196536U
JPS61196536U JP8072385U JP8072385U JPS61196536U JP S61196536 U JPS61196536 U JP S61196536U JP 8072385 U JP8072385 U JP 8072385U JP 8072385 U JP8072385 U JP 8072385U JP S61196536 U JPS61196536 U JP S61196536U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
storage container
filtration filter
molecular filtration
wafer storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8072385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019172Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8072385U priority Critical patent/JPH019172Y2/ja
Publication of JPS61196536U publication Critical patent/JPS61196536U/ja
Application granted granted Critical
Publication of JPH019172Y2 publication Critical patent/JPH019172Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
JP8072385U 1985-05-29 1985-05-29 Expired JPH019172Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8072385U JPH019172Y2 (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8072385U JPH019172Y2 (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Publications (2)

Publication Number Publication Date
JPS61196536U true JPS61196536U (enrdf_load_stackoverflow) 1986-12-08
JPH019172Y2 JPH019172Y2 (enrdf_load_stackoverflow) 1989-03-13

Family

ID=30626846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8072385U Expired JPH019172Y2 (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Country Status (1)

Country Link
JP (1) JPH019172Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6032802A (en) * 1995-11-16 2000-03-07 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with filter means

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6032802A (en) * 1995-11-16 2000-03-07 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with filter means
US6105781A (en) * 1995-11-16 2000-08-22 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with unitary porous gasket

Also Published As

Publication number Publication date
JPH019172Y2 (enrdf_load_stackoverflow) 1989-03-13

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