JPS61171253U - - Google Patents

Info

Publication number
JPS61171253U
JPS61171253U JP5466285U JP5466285U JPS61171253U JP S61171253 U JPS61171253 U JP S61171253U JP 5466285 U JP5466285 U JP 5466285U JP 5466285 U JP5466285 U JP 5466285U JP S61171253 U JPS61171253 U JP S61171253U
Authority
JP
Japan
Prior art keywords
container
inner container
semiconductor substrate
accommodating
outer container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5466285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5466285U priority Critical patent/JPS61171253U/ja
Publication of JPS61171253U publication Critical patent/JPS61171253U/ja
Pending legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP5466285U 1985-04-12 1985-04-12 Pending JPS61171253U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5466285U JPS61171253U (zh) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5466285U JPS61171253U (zh) 1985-04-12 1985-04-12

Publications (1)

Publication Number Publication Date
JPS61171253U true JPS61171253U (zh) 1986-10-24

Family

ID=30576623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5466285U Pending JPS61171253U (zh) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPS61171253U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02235349A (ja) * 1989-03-09 1990-09-18 Fujitsu Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02235349A (ja) * 1989-03-09 1990-09-18 Fujitsu Ltd 半導体装置の製造方法

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