JPS61171253U - - Google Patents
Info
- Publication number
- JPS61171253U JPS61171253U JP5466285U JP5466285U JPS61171253U JP S61171253 U JPS61171253 U JP S61171253U JP 5466285 U JP5466285 U JP 5466285U JP 5466285 U JP5466285 U JP 5466285U JP S61171253 U JPS61171253 U JP S61171253U
- Authority
- JP
- Japan
- Prior art keywords
- container
- inner container
- semiconductor substrate
- accommodating
- outer container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例を示す縦断面図、第
２図はその斜視図である。
１…内容器、２…外容器、３…仕切り板、４…
板バネ、５…半導体基板。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIG. 2 is a perspective view thereof. 1... Inner container, 2... Outer container, 3... Partition plate, 4...
Leaf spring, 5... semiconductor substrate.
Claims (1)
収容する外容器とを有し、これら内容器と外容器
とは前記内容器に取り付けられかつ前記外容器に
とりはずし自由に設けられた仕切り板に当接する
板バネで相互に固定されることを特徴とする半導
体基板収納容器。 It has an inner container for accommodating a semiconductor substrate, and an outer container for accommodating the inner container, and the inner container and the outer container are connected to a partition plate attached to the inner container and freely removable to the outer container. A semiconductor substrate storage container characterized in that they are mutually fixed by abutting leaf springs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5466285U JPS61171253U (en) | 1985-04-12 | 1985-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5466285U JPS61171253U (en) | 1985-04-12 | 1985-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61171253U true JPS61171253U (en) | 1986-10-24 |
Family
ID=30576623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5466285U Pending JPS61171253U (en) | 1985-04-12 | 1985-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61171253U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02235349A (en) * | 1989-03-09 | 1990-09-18 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1985
- 1985-04-12 JP JP5466285U patent/JPS61171253U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02235349A (en) * | 1989-03-09 | 1990-09-18 | Fujitsu Ltd | Manufacture of semiconductor device |
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