JPS61171253U - - Google Patents

Info

Publication number
JPS61171253U
JPS61171253U JP5466285U JP5466285U JPS61171253U JP S61171253 U JPS61171253 U JP S61171253U JP 5466285 U JP5466285 U JP 5466285U JP 5466285 U JP5466285 U JP 5466285U JP S61171253 U JPS61171253 U JP S61171253U
Authority
JP
Japan
Prior art keywords
container
inner container
semiconductor substrate
accommodating
outer container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5466285U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5466285U priority Critical patent/JPS61171253U/ja
Publication of JPS61171253U publication Critical patent/JPS61171253U/ja
Pending legal-status Critical Current

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  • Packaging Frangible Articles (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例を示す縦断面図、第
2図はその斜視図である。 1…内容器、2…外容器、3…仕切り板、4…
板バネ、5…半導体基板。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention, and FIG. 2 is a perspective view thereof. 1... Inner container, 2... Outer container, 3... Partition plate, 4...
Leaf spring, 5... semiconductor substrate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体基板を収納する内容器と、この内容器を
収容する外容器とを有し、これら内容器と外容器
とは前記内容器に取り付けられかつ前記外容器に
とりはずし自由に設けられた仕切り板に当接する
板バネで相互に固定されることを特徴とする半導
体基板収納容器。
It has an inner container for accommodating a semiconductor substrate, and an outer container for accommodating the inner container, and the inner container and the outer container are connected to a partition plate attached to the inner container and freely removable to the outer container. A semiconductor substrate storage container characterized in that they are mutually fixed by abutting leaf springs.
JP5466285U 1985-04-12 1985-04-12 Pending JPS61171253U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5466285U JPS61171253U (en) 1985-04-12 1985-04-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5466285U JPS61171253U (en) 1985-04-12 1985-04-12

Publications (1)

Publication Number Publication Date
JPS61171253U true JPS61171253U (en) 1986-10-24

Family

ID=30576623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5466285U Pending JPS61171253U (en) 1985-04-12 1985-04-12

Country Status (1)

Country Link
JP (1) JPS61171253U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02235349A (en) * 1989-03-09 1990-09-18 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02235349A (en) * 1989-03-09 1990-09-18 Fujitsu Ltd Manufacture of semiconductor device

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