JPS61171252U - - Google Patents

Info

Publication number
JPS61171252U
JPS61171252U JP5463485U JP5463485U JPS61171252U JP S61171252 U JPS61171252 U JP S61171252U JP 5463485 U JP5463485 U JP 5463485U JP 5463485 U JP5463485 U JP 5463485U JP S61171252 U JPS61171252 U JP S61171252U
Authority
JP
Japan
Prior art keywords
wafers
stages
pair
storage container
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5463485U
Other languages
Japanese (ja)
Other versions
JPH0648858Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985054634U priority Critical patent/JPH0648858Y2/en
Priority to US06/819,253 priority patent/US4759681A/en
Publication of JPS61171252U publication Critical patent/JPS61171252U/ja
Application granted granted Critical
Publication of JPH0648858Y2 publication Critical patent/JPH0648858Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、この考案の一実施例に係るストツカ
ーにウエハを収納した状態を示す平面図である。
第２図は、第１図の線―に沿う部分断面図で
ある。第３図Ａ〜Ｃは、それぞれ、第１図のスト
ツカーを部分的に示す正面図、平面図及び左側面
図である。第４図は、この考案の背景を成すウエ
ハハンドリング方法を説明するためのエンドステ
ーシヨンの概略平面図である。第５図は、第４図
の線―に沿う概略断面図である。第６図は、
従来のストツカーにウエハを収納した状態を示す
平面図である。第７図は、第６図の線―に沿
う部分断面図である。 ２…ウエハ、２ｄ…ダミーウエハ、８０…実施
例に係るストツカー、８１ａ，８１ｂ…側板、８
２ａ，８２ｂ…棚、８３ａ，８３ｂ…窪み。 FIG. 1 is a plan view showing a state in which wafers are stored in a stocker according to an embodiment of this invention.
FIG. 2 is a partial sectional view taken along line - in FIG. 1. 3A to 3C are a front view, a top view, and a left side view, respectively, partially showing the stocker of FIG. 1. FIG. 4 is a schematic plan view of an end station for explaining the wafer handling method that forms the background of this invention. FIG. 5 is a schematic sectional view taken along the line - in FIG. 4. Figure 6 shows
FIG. 2 is a plan view showing a state in which wafers are stored in a conventional stocker. FIG. 7 is a partial sectional view taken along the line - in FIG. 6. 2... Wafer, 2d... Dummy wafer, 80... Stocker according to the example, 81a, 81b... Side plate, 8
2a, 82b...shelf, 83a, 83b...dent.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハの端部をそれぞれ乗せるように対向した
一対の棚を複数段有するウエハ収納容器において
、当該一対の棚の１段以上に、ウエハの端部を納
める窪みをそれぞれ設けていることを特徴とする
ウエハ収納容器。 A wafer storage container having a plurality of stages of a pair of shelves facing each other so as to place the ends of the wafers thereon, characterized in that one or more stages of the pair of shelves are each provided with a recess for storing the ends of the wafers. Wafer storage container.
JP1985054634U 1985-01-22 1985-04-11 Wafer storage container Expired - Lifetime JPH0648858Y2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1985054634U JPH0648858Y2 (en) 1985-04-11 1985-04-11 Wafer storage container
US06/819,253 US4759681A (en) 1985-01-22 1986-01-16 End station for an ion implantation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985054634U JPH0648858Y2 (en) 1985-04-11 1985-04-11 Wafer storage container

Publications (2)

Publication Number Publication Date
JPS61171252U true JPS61171252U (en) 1986-10-24
JPH0648858Y2 JPH0648858Y2 (en) 1994-12-12

Family

ID=30576567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985054634U Expired - Lifetime JPH0648858Y2 (en) 1985-01-22 1985-04-11 Wafer storage container

Country Status (1)

Country Link
JP (1) JPH0648858Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01160833U (en) * 1988-04-12 1989-11-08
JP2013089845A (en) * 2011-10-20 2013-05-13 Disco Abrasive Syst Ltd Wafer cassette

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60226134A (en) * 1984-04-25 1985-11-11 Hitachi Ltd Semiconductor manufacture apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60226134A (en) * 1984-04-25 1985-11-11 Hitachi Ltd Semiconductor manufacture apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01160833U (en) * 1988-04-12 1989-11-08
JP2013089845A (en) * 2011-10-20 2013-05-13 Disco Abrasive Syst Ltd Wafer cassette

Also Published As

Publication number Publication date
JPH0648858Y2 (en) 1994-12-12

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