JPS61168371U - - Google Patents

Info

Publication number
JPS61168371U
JPS61168371U JP5098985U JP5098985U JPS61168371U JP S61168371 U JPS61168371 U JP S61168371U JP 5098985 U JP5098985 U JP 5098985U JP 5098985 U JP5098985 U JP 5098985U JP S61168371 U JPS61168371 U JP S61168371U
Authority
JP
Japan
Prior art keywords
fixed
spindle
compressor
flow path
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5098985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416038Y2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5098985U priority Critical patent/JPH0416038Y2/ja
Publication of JPS61168371U publication Critical patent/JPS61168371U/ja
Application granted granted Critical
Publication of JPH0416038Y2 publication Critical patent/JPH0416038Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
JP5098985U 1985-04-08 1985-04-08 Expired JPH0416038Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5098985U JPH0416038Y2 (zh) 1985-04-08 1985-04-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5098985U JPH0416038Y2 (zh) 1985-04-08 1985-04-08

Publications (2)

Publication Number Publication Date
JPS61168371U true JPS61168371U (zh) 1986-10-18
JPH0416038Y2 JPH0416038Y2 (zh) 1992-04-10

Family

ID=30569636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5098985U Expired JPH0416038Y2 (zh) 1985-04-08 1985-04-08

Country Status (1)

Country Link
JP (1) JPH0416038Y2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015165144A (ja) * 2014-02-28 2015-09-17 株式会社フジキン ダイヤフラム弁用アクチュエータ及びこのアクチュエータを備えた流体制御器
JP2016151308A (ja) * 2015-02-17 2016-08-22 エスアールエンジニアリング株式会社 開閉弁

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015165144A (ja) * 2014-02-28 2015-09-17 株式会社フジキン ダイヤフラム弁用アクチュエータ及びこのアクチュエータを備えた流体制御器
JP2016151308A (ja) * 2015-02-17 2016-08-22 エスアールエンジニアリング株式会社 開閉弁

Also Published As

Publication number Publication date
JPH0416038Y2 (zh) 1992-04-10

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