JPS61167362U - - Google Patents
Info
- Publication number
- JPS61167362U JPS61167362U JP5112285U JP5112285U JPS61167362U JP S61167362 U JPS61167362 U JP S61167362U JP 5112285 U JP5112285 U JP 5112285U JP 5112285 U JP5112285 U JP 5112285U JP S61167362 U JPS61167362 U JP S61167362U
- Authority
- JP
- Japan
- Prior art keywords
- backscattered electron
- backscattered
- detection device
- detector
- electron detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5112285U JPS61167362U (pl) | 1985-04-08 | 1985-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5112285U JPS61167362U (pl) | 1985-04-08 | 1985-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61167362U true JPS61167362U (pl) | 1986-10-17 |
Family
ID=30569886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5112285U Pending JPS61167362U (pl) | 1985-04-08 | 1985-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61167362U (pl) |
-
1985
- 1985-04-08 JP JP5112285U patent/JPS61167362U/ja active Pending
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