JPS61166465U - - Google Patents

Info

Publication number
JPS61166465U
JPS61166465U JP4966685U JP4966685U JPS61166465U JP S61166465 U JPS61166465 U JP S61166465U JP 4966685 U JP4966685 U JP 4966685U JP 4966685 U JP4966685 U JP 4966685U JP S61166465 U JPS61166465 U JP S61166465U
Authority
JP
Japan
Prior art keywords
electrode
extraction
electron beam
beam generator
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4966685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4966685U priority Critical patent/JPS61166465U/ja
Publication of JPS61166465U publication Critical patent/JPS61166465U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP4966685U 1985-04-03 1985-04-03 Pending JPS61166465U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4966685U JPS61166465U (ko) 1985-04-03 1985-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4966685U JPS61166465U (ko) 1985-04-03 1985-04-03

Publications (1)

Publication Number Publication Date
JPS61166465U true JPS61166465U (ko) 1986-10-15

Family

ID=30567071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4966685U Pending JPS61166465U (ko) 1985-04-03 1985-04-03

Country Status (1)

Country Link
JP (1) JPS61166465U (ko)

Similar Documents

Publication Publication Date Title
JPS61166465U (ko)
JPS6354241U (ko)
JPS61116054U (ko)
JPS5974659U (ja) イオン注入装置のイオン発生装置
JPS5912258U (ja) 電子線照射装置
JPH0163062U (ko)
JPS62193659U (ko)
JPS6296255U (ko)
JPS6175052U (ko)
JPH0276462U (ko)
GB1507087A (en) Extractor ion source
JPH0229150U (ko)
JPS61204091U (ko)
JPS62112848U (ko)
JPS58110949U (ja) イオン銃
JPS6194846U (ko)
JPS6284149U (ko)
JPS6375937U (ko)
JPS62114064U (ko)
JPS6292550U (ko)
JPS61199860U (ko)
JPS6212355U (ko)
JPH01120951U (ko)
JPS6161750U (ko)
JPS61100872U (ko)