JPH01120951U - - Google Patents
Info
- Publication number
- JPH01120951U JPH01120951U JP1420988U JP1420988U JPH01120951U JP H01120951 U JPH01120951 U JP H01120951U JP 1420988 U JP1420988 U JP 1420988U JP 1420988 U JP1420988 U JP 1420988U JP H01120951 U JPH01120951 U JP H01120951U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- exhaust pipe
- rotary pump
- potential part
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Electrostatic Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1420988U JPH01120951U (ko) | 1988-02-05 | 1988-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1420988U JPH01120951U (ko) | 1988-02-05 | 1988-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01120951U true JPH01120951U (ko) | 1989-08-16 |
Family
ID=31225204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1420988U Pending JPH01120951U (ko) | 1988-02-05 | 1988-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01120951U (ko) |
-
1988
- 1988-02-05 JP JP1420988U patent/JPH01120951U/ja active Pending