JPS61165950A - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS61165950A
JPS61165950A JP153786A JP153786A JPS61165950A JP S61165950 A JPS61165950 A JP S61165950A JP 153786 A JP153786 A JP 153786A JP 153786 A JP153786 A JP 153786A JP S61165950 A JPS61165950 A JP S61165950A
Authority
JP
Japan
Prior art keywords
source device
light source
microwave
cross
discharge light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP153786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130254B2 (enExample
Inventor
Kenji Yoshizawa
憲治 吉沢
Hitoshi Kodama
児玉　仁史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP153786A priority Critical patent/JPS61165950A/ja
Publication of JPS61165950A publication Critical patent/JPS61165950A/ja
Publication of JPH0130254B2 publication Critical patent/JPH0130254B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP153786A 1986-01-08 1986-01-08 マイクロ波放電光源装置 Granted JPS61165950A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP153786A JPS61165950A (ja) 1986-01-08 1986-01-08 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP153786A JPS61165950A (ja) 1986-01-08 1986-01-08 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS61165950A true JPS61165950A (ja) 1986-07-26
JPH0130254B2 JPH0130254B2 (enExample) 1989-06-19

Family

ID=11504271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP153786A Granted JPS61165950A (ja) 1986-01-08 1986-01-08 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS61165950A (enExample)

Also Published As

Publication number Publication date
JPH0130254B2 (enExample) 1989-06-19

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