JPS61165949A - マイクロ波放電光源装置 - Google Patents
マイクロ波放電光源装置Info
- Publication number
- JPS61165949A JPS61165949A JP153686A JP153686A JPS61165949A JP S61165949 A JPS61165949 A JP S61165949A JP 153686 A JP153686 A JP 153686A JP 153686 A JP153686 A JP 153686A JP S61165949 A JPS61165949 A JP S61165949A
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- mesh plate
- cavity
- elastic body
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920002379 silicone rubber Polymers 0.000 claims abstract description 5
- 239000004945 silicone rubber Substances 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 230000000694 effects Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- -1 mercury or iron Chemical compound 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP153686A JPS61165949A (ja) | 1986-01-08 | 1986-01-08 | マイクロ波放電光源装置 |
US06/947,915 US4838718A (en) | 1986-01-08 | 1986-12-29 | Printing device |
US07/294,756 US4904096A (en) | 1986-01-08 | 1989-01-09 | Printing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP153686A JPS61165949A (ja) | 1986-01-08 | 1986-01-08 | マイクロ波放電光源装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61165949A true JPS61165949A (ja) | 1986-07-26 |
JPS6336082B2 JPS6336082B2 (enrdf_load_stackoverflow) | 1988-07-19 |
Family
ID=11504243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP153686A Granted JPS61165949A (ja) | 1986-01-08 | 1986-01-08 | マイクロ波放電光源装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61165949A (enrdf_load_stackoverflow) |
-
1986
- 1986-01-08 JP JP153686A patent/JPS61165949A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6336082B2 (enrdf_load_stackoverflow) | 1988-07-19 |
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