JPS61165611A - Measuring apparatus for change of angle - Google Patents

Measuring apparatus for change of angle

Info

Publication number
JPS61165611A
JPS61165611A JP687985A JP687985A JPS61165611A JP S61165611 A JPS61165611 A JP S61165611A JP 687985 A JP687985 A JP 687985A JP 687985 A JP687985 A JP 687985A JP S61165611 A JPS61165611 A JP S61165611A
Authority
JP
Japan
Prior art keywords
angle
change
diffused
point
hologram
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP687985A
Other languages
Japanese (ja)
Inventor
Tadashi Kaneko
正 金子
Takeo Sato
佐藤 健夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP687985A priority Critical patent/JPS61165611A/en
Publication of JPS61165611A publication Critical patent/JPS61165611A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Abstract

PURPOSE:To measure accurately the change of angle, by measuring interference condition of two diffused waves irradiated from a hologram provided with a function as a double-focus lens. CONSTITUTION:Firstly, by a laser light beam irradiated from a laser beam source 4 a hologram 5 emits No.1 and No.2 diffused waves (a) and (b). On the other hand, an interference condition measuring apparatus 6 is located in a position where each wave interferes mutually by the No.1 and the No.2 diffused moves at a point D and it is installed free to displace along a curve 8 through the same angle as the changed angle beta in the directions of arrows C, C' with the zero point as the center. When the initial angle alpha changed into the angle beta and this angle beta is measured, the apparatus 6 which displaces by the same angle in the direction of the arrow C according to the angle beta, passes through 8a, 8b, 8c where the No.1 and the No.2 waves interfere each other until it arrives at the D' point. The amount of this passage is transmitted into a calculating unit 7 and at the unit 7, the angle beta can be determined by geometrical calculations with this amount as the basis.

Description

【発明の詳細な説明】 産業上の利用分野 本発明はホログラムを用いて、変化した角度の量を測定
する変化角度測定装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a change angle measuring device that uses a hologram to measure the amount of change in angle.

従来の技術 以下、第4図を参照しながら従来の変化角度測定装置に
ついて説明する。
BACKGROUND OF THE INVENTION Hereinafter, a conventional change angle measuring device will be explained with reference to FIG.

第4図において、1は被測定角の頂点に設置したギア、
2はギア1に適度に当接させているギア、3はギア2に
接続されているポテンンヨンメータである。
In Fig. 4, 1 is a gear installed at the apex of the angle to be measured;
2 is a gear that is brought into proper contact with gear 1, and 3 is a potentiometer connected to gear 2.

上記構成において、初期角度αからβだけ角度変化(以
下、変化角度βと称する)が生じ、この変化角度βを測
定したい場合、ギア1をム点から8点まで矢印Cの方向
に沿って回動させる。この回動に伴ない、ギア2は矢印
C′の方向に回動する。
In the above configuration, if an angle change occurs by β from the initial angle α (hereinafter referred to as change angle β) and you want to measure this change angle β, rotate gear 1 from point 8 to point 8 in the direction of arrow C. make it move. Along with this rotation, the gear 2 rotates in the direction of arrow C'.

そして、この回動により、ボテンシコンメータ3は変化
角度βを電気信号(パルス信号)として捉えることかで
きる。
This rotation allows the potentiometer 3 to capture the change angle β as an electrical signal (pulse signal).

発明が解決しようとする問題点 しかし第4図に示したような構成では、ギア1゜2間の
当接状態により生じる誤差、ギア1,2のバックラッシ
ュによる誤差、ポテンションメータ3が角度を電気信号
に変換するときの角度分解能精度により生じる誤差等、
種々の問題を有している。
Problems to be Solved by the Invention However, in the configuration shown in FIG. Errors caused by angular resolution accuracy when converting to electrical signals, etc.
It has various problems.

本発明は上記欠点に鑑み、軽量で、小型で、かつ精度の
高い変化角度測定装置を提供するものである。
In view of the above-mentioned drawbacks, the present invention provides a light-weight, small-sized, and highly accurate changing angle measuring device.

問題点を解決するだめの手段 本願発明は、この目的を達成するためにコヒーレント性
の高い光線を出射する光源と、前記光源から出射された
光線により第1.第2の拡散波を発生するホログラムと
、前記ホログラムから出射された第1.第2の拡散波の
干渉状態を測定すべき変化角度に応じて移動しながら測
定する干渉状態測定手段と、前記干渉状態測定手段が移
動しながら測定した第1.第2の拡散波の互いの干渉状
態から幾何学的に前記変化角度を算出する計算部を備え
た変化角度測定装置である。
Means for Solving the Problems In order to achieve this object, the present invention provides a light source that emits a highly coherent light beam, and a light beam emitted from the light source that allows the light beams emitted from the light source to emit a first light beam. a hologram that generates a second diffused wave, and a first diffused wave emitted from the hologram. interference state measuring means for measuring the interference state of the second diffused wave while moving according to the change angle to be measured; The variation angle measuring device includes a calculation unit that geometrically calculates the variation angle from the mutual interference state of the second diffused waves.

作用 上記構成により本願発明は、精度の良い変化角度を測定
することができ、軽量で、設置が自由な小型な装置とな
る。
Effect: With the above-mentioned configuration, the present invention becomes a compact device that can measure the angle of change with high precision, is lightweight, and can be installed freely.

実施例 以下、図面を参照しながら本発明の一実施例について説
明する。
Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例における変化角度測定装置の
要部構成を示すものである。
FIG. 1 shows the main structure of a change angle measuring device in an embodiment of the present invention.

第1図において、4は線分OA上に設けられたレーザ光
を出射するレーザ光源である。5はレーザ光源1と同様
に線分0ムの延長上に設けられているホログラムで、レ
ーザ光源4から出射されたレーザ光により第1.第2の
拡散波を出力する二重焦点レンズとしての機能を有する
。なお、この第1の拡散波の焦点を人、第2の拡散波の
焦点をBとする。6はホログラム5から送出された第1
゜第2の拡散波の干渉状態を測定する干渉状態測定装置
で、〈ムODの頂点である0点を中心点としてアーム6
aにより常時等距離で矢印c 、 c’の方向に移動可
能に設けられている。すなわち干渉状態測定装置6は0
点を中心として矢印c 、 c’の方向に移動しながら
、第1.第2の拡散波が互いに干渉し合う干渉量を測定
している。7は計算部で、干渉状態測定装置6が測定し
た干渉量により幾何学的に計算し変化角度βを求める。
In FIG. 1, reference numeral 4 denotes a laser light source that emits a laser beam provided on the line segment OA. 5 is a hologram provided on the extension of the line segment 0m, similar to the laser light source 1, and the laser light emitted from the laser light source 4 causes the first . It functions as a bifocal lens that outputs the second diffused wave. Note that the focus of the first diffused wave is a person, and the focus of the second diffused wave is B. 6 is the first signal sent out from the hologram 5.
゜This is an interference state measuring device that measures the interference state of the second diffused wave.
It is provided so that it can always move equidistantly in the directions of arrows c and c'. In other words, the interference state measuring device 6 is 0.
While moving in the directions of arrows c and c' with the point as the center, select the first point. The amount of interference caused by the second spread waves interfering with each other is measured. Reference numeral 7 denotes a calculation unit that performs geometric calculations based on the amount of interference measured by the interference state measuring device 6 to determine the angle of change β.

以上のような構成において、以下その動作について説明
する。
The operation of the above configuration will be explained below.

まずレーザ光源4より出射されたレーザ光により、ホロ
グラム5は第1.第2の拡散波が出力される。一方、干
渉状態測定装置6はその第1.第2の拡散波により、第
2図に示すようなり点で互いの波が干渉し合う場所に設
置されるとともに、曲線8に沿って移動可能、すなわち
第1図の0点を中心として矢印c、c’の方向に、かつ
変化角度βと同じ角度だけ移動可能に設けられている。
First, a laser beam emitted from the laser light source 4 causes the hologram 5 to be moved to the first hologram. A second diffused wave is output. On the other hand, the interference state measuring device 6 uses the first. Due to the second diffused wave, it is installed at a place where the waves interfere with each other at the point shown in FIG. 2, and it is movable along the curve 8, that is, the arrow c , c' and by the same angle as the change angle β.

さて初期角度αが変化して変化角度βが生じ、この変化
角度βを測定したい場合、この変化角度βに従って矢印
Cの方向に同じ角度だけ移動する干渉状態測定装置6は
D/点に到達するまでに第1、第2の波が互いに干渉す
るsa、sb、acの間を通過する。この通過量は計算
部7に送出される。計算部7ではこの通過量に基に幾何
学的計算により変化角度βも求めることができる。
Now, when the initial angle α changes and a change angle β occurs, and it is desired to measure this change angle β, the interference state measuring device 6 moves by the same angle in the direction of arrow C according to this change angle β and reaches point D/. Until then, the first and second waves pass between sa, sb, and ac, which interfere with each other. This amount of passage is sent to the calculation section 7. The calculation unit 7 can also calculate the change angle β by geometric calculation based on this amount of passage.

以下、計算部7の計算について、第3図を参照しながら
説明を行う。
Hereinafter, the calculation by the calculation unit 7 will be explained with reference to FIG.

なお第3図において、ム、Bはホログラム6から出射さ
れる第1.第2の拡散波の焦点位置で、とりわけ人魚は
X−Y座標の原点に便宜上位置しているものとする。0
点を頂点とする角度(α′+θ)が初期角度、角度βが
変化角度、Dが干渉状態測定手段6が設置されていた点
 D/が干渉状態測定装置6が変化角度βを測定するた
めに移動した点である。y、は8点におけるy座標であ
る。
In FIG. 3, M and B are the first . It is assumed for convenience that, in particular, the mermaid is located at the origin of the XY coordinates at the focal point of the second diffused wave. 0
The angle (α' + θ) with the point as the apex is the initial angle, the angle β is the change angle, D is the point where the interference state measuring means 6 was installed, and D/ is because the interference state measuring device 6 measures the change angle β. This is the point where it moved to . y is the y coordinate at 8 points.

ホログラム5から出射された第1.第2の拡散波が球面
波と仮定すると、人点からの拡散波の等価相面(但し、
或時間t=t0において、位相がO)は、 x 2 +y 2 =t1rλ (但し、10=0.1
.2・・・ン・・・・・・(1) また、B点からの拡散波の等価相面は x2+ (y  y、 >2 =nλ (但し、n==o、1,2・・・)    ・・・・・
・(2)となる。
The first beam emitted from the hologram 5. Assuming that the second diffused wave is a spherical wave, the equivalent phase surface of the diffused wave from the human point (however,
At a certain time t=t0, the phase is O) is x 2 +y 2 =t1rλ (where 10=0.1
.. 2...N...(1) Also, the equivalent phase surface of the diffused wave from point B is x2+ (y y, >2 = nλ (where n==o, 1, 2... )・・・・・・
・(2) becomes.

上記第1式、第2式から、交点の座標(第1゜第2の拡
散波が互いに干渉する点)は、2 y、     2 
、!/。
From the first and second equations above, the coordinates of the intersection (the point where the 1st and 2nd diffused waves interfere with each other) are 2 y, 2
,! /.

(但し、m=1.2.3−・・・・、に=n−m )と
なる。
(However, m=1.2.3-..., ni=nm).

一方、変化角度βにより生じる干渉状態測定装置6のD
′点は xI)t =3:0+on cos(α+β−θ)・・
・・・乍)yDt = y0+OD  5in(α+β
−θ>   −・・・−<e>となる。
On the other hand, D of the interference state measuring device 6 caused by the change angle β
' point is xI) t = 3:0 + on cos (α + β - θ)...
・・・乍)yDt = y0+OD 5in(α+β
-θ>-...-<e>.

以上の第3.4,5.6式を同時に満す点が干渉状態測
定装置6が計測する干渉縞となる。すなわち、 2y。
Points that simultaneously satisfy Equations 3.4 and 5.6 become interference fringes measured by the interference state measuring device 6. That is, 2y.

なる点が多数存在し、干渉状態測定装置6はこの第7,
8式を満足する多数の点を干渉として測定する。
There are many points, and the interference state measuring device 6
A large number of points satisfying Equation 8 are measured as interference.

一方、計算部7は干渉状態測定装置6が回動する除虫じ
る干渉状態をあらかじめシュミュレーションしであるた
め、干渉状態測定装置6が測定した値(干渉縞)から幾
何学的に変化角度βを求めることができる。
On the other hand, since the calculation unit 7 simulates in advance the interference state in which the interference state measuring device 6 rotates, it calculates the angle of change geometrically from the value (interference fringes) measured by the interference state measuring device 6. β can be found.

なお、第1、あるいは第2の拡散波の焦点人、あるいは
Bをホログラムを選択することにより0点に一致させ、
干渉状態測定装置6の回動する軌跡をどちらかの波に一
致させるよう構成すれば、さらにその測定精度は向上す
る。
In addition, the focus person or B of the first or second diffused wave is made to match the zero point by selecting the hologram,
If the rotation trajectory of the interference state measuring device 6 is configured to match one of the waves, the measurement accuracy will be further improved.

発明の効果 以上のように本発明は、二重焦点レンズとしての機能を
有するホログラムから出射される第1゜第2の拡散波の
干渉状態を測定するだけで、精度の良い変化角度を測定
することができ、軽量で、設置が自由な小型な装置を提
供することができる。
Effects of the Invention As described above, the present invention can accurately measure the angle of change by simply measuring the interference state of the first and second diffused waves emitted from the hologram that functions as a bifocal lens. It is possible to provide a compact device that is lightweight and can be installed freely.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例における変化角度測定装置の
要部ブロック図、第2図は第1.第2の拡散波の干渉状
態を示す概念図、第3図a、bは同装置の測定位置関係
を示した幾何学的な図、第4図は従来の変化角度測定装
置の要部ブロック図である。 4・・・・・・レーザ光S、S・旧・・ホログラム、6
・・・…干渉状態測定装置、7・・・・・・計算部。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第2
図 第3図
FIG. 1 is a block diagram of the main parts of a change angle measuring device according to an embodiment of the present invention, and FIG. A conceptual diagram showing the interference state of the second diffused wave, Figures 3a and 3b are geometric diagrams showing the measurement positional relationship of the device, and Figure 4 is a block diagram of the main parts of a conventional change angle measuring device. It is. 4... Laser light S, S old... hologram, 6
. . . Interference state measuring device, 7 . . . Calculation unit. Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
Figure 3

Claims (3)

【特許請求の範囲】[Claims] (1)コヒーレント性の高い光線を出射する光源と、前
記光源から出射された光線により第1、第2の拡散波を
発生するホログラムと、前記ホログラムから出射された
第1、第2の拡散波の干渉状態を測定すべき変化角度に
応じて移動しながら測定する干渉状態測定手段と、前記
干渉状態測定手段が移動しながら測定した第1、第2の
拡散波の互いの干渉状態から幾何学的に前記変化角度を
算出する計算部とを具備する変化角度測定装置。
(1) A light source that emits a highly coherent light beam, a hologram that generates first and second diffused waves using the light beam emitted from the light source, and first and second diffused waves that are emitted from the hologram. interference state measuring means for measuring the interference state of the first and second diffused waves while moving according to the change angle to be measured; A calculation unit that calculates the angle of change according to the angle of change.
(2)干渉状態測定手段は測定すべき変化角度点を中心
に等距離で回動することを特徴とする特許請求の範囲第
1項記載の変化角度測定装置。
(2) The change angle measuring device according to claim 1, wherein the interference state measuring means rotates at an equal distance around the change angle point to be measured.
(3)干渉状態測定手段はアームの一端に設置され、前
記アームの他端は測定すべき変化角度点に回動自在に設
けられていることを特徴とする特許請求の範囲第1項記
載の変化角度測定装置。
(3) The interference state measuring means is installed at one end of the arm, and the other end of the arm is rotatably provided at a change angle point to be measured. Change angle measuring device.
JP687985A 1985-01-18 1985-01-18 Measuring apparatus for change of angle Pending JPS61165611A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP687985A JPS61165611A (en) 1985-01-18 1985-01-18 Measuring apparatus for change of angle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP687985A JPS61165611A (en) 1985-01-18 1985-01-18 Measuring apparatus for change of angle

Publications (1)

Publication Number Publication Date
JPS61165611A true JPS61165611A (en) 1986-07-26

Family

ID=11650507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP687985A Pending JPS61165611A (en) 1985-01-18 1985-01-18 Measuring apparatus for change of angle

Country Status (1)

Country Link
JP (1) JPS61165611A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2618103A1 (en) * 2012-01-17 2013-07-24 Hexagon Technology Center GmbH Method, device and computer program for measuring an angle between two separated elements and its use

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2618103A1 (en) * 2012-01-17 2013-07-24 Hexagon Technology Center GmbH Method, device and computer program for measuring an angle between two separated elements and its use
WO2013107780A1 (en) * 2012-01-17 2013-07-25 Hexagon Technology Center Gmbh Method for measuring an angle between two spatially separated elements
US9625255B2 (en) 2012-01-17 2017-04-18 Hexagon Technology Center Gmbh Method for measuring an angle between two spatially separated elements

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