JPS61164278A - Temperature compensation for semiconductor magnetic conversion element - Google Patents
Temperature compensation for semiconductor magnetic conversion elementInfo
- Publication number
- JPS61164278A JPS61164278A JP60005594A JP559485A JPS61164278A JP S61164278 A JPS61164278 A JP S61164278A JP 60005594 A JP60005594 A JP 60005594A JP 559485 A JP559485 A JP 559485A JP S61164278 A JPS61164278 A JP S61164278A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- semiconductor element
- voltage
- circuit
- hall effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
- H10N52/80—Constructional details
Abstract
Description
【発明の詳細な説明】
本発明は、半導体磁気変換素子の残留電圧温度補償とホ
ール係数温度補償に関するものである。半導体磁気変換
素子を用いての低い磁界の磁気量測定は、温度変化が大
きく依存し測定に難易があつた。又、半導体素子全体を
恒温槽で常に一定に一定温度に保つ方式があるがセンサ
ーが大きくなつて測定が不便であつた。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to residual voltage temperature compensation and Hall coefficient temperature compensation of a semiconductor magnetic transducer element. Measuring the magnetic quantity of a low magnetic field using a semiconductor magnetic transducer is difficult because it is largely dependent on temperature changes. Furthermore, there is a method in which the entire semiconductor element is kept at a constant temperature in a constant temperature bath, but the sensor becomes large and measurement is inconvenient.
本方法は、半導体素子の残留電圧温度依存性、ホール係
数温度依存性を制御側抵抗の+(ブラス)の電気抵抗変
化を検出しホール効果装置を補償するものである。In this method, the residual voltage temperature dependence and Hall coefficient temperature dependence of a semiconductor element are compensated for by detecting a + (brass) electric resistance change of a control side resistance.
本装置の基本的動作原理について説明する。The basic operating principle of this device will be explained.
ホール効果半導体素子のホール起電圧式は、Vout=
RK I・B/d+V(I・B0) (1)式RK:ホ
ール係数。I:励磁電流。B:磁束密度。The Hall electromotive voltage formula of a Hall effect semiconductor device is Vout=
RK I・B/d+V(I・B0) (1) Formula RK: Hall coefficient. I: Excitation current. B: Magnetic flux density.
d:素子の厚さ。d: Thickness of element.
ホール起電圧の第1項目は、磁束密度Bに対する出力電
圧、第2項目は無磁界時のホール素子の残留電圧V(I
・B0)である。磁束密度に依存した、起電圧RK・I
・B/d のホール係数RKは負の温度係数(第4図)
を有している。残留電圧に依存した電圧V(I・B0)
は正の温度係数を有している。 本発明は、前記2つの
温度依存性による変化を1次側制御抵抗の温度依存性(
抵抗の温度係数)を検出することにより磁界に依存した
負の温度係数、残留電圧に依存した、正の温度係数を同
時に補償するものである。The first item of the Hall electromotive voltage is the output voltage with respect to the magnetic flux density B, and the second item is the residual voltage V (I
・B0). Electromotive force RK・I depending on magnetic flux density
・The Hall coefficient RK of B/d is a negative temperature coefficient (Figure 4)
have. Voltage V (I・B0) dependent on residual voltage
has a positive temperature coefficient. The present invention converts the changes due to the two temperature dependencies to the temperature dependence (
By detecting the temperature coefficient of resistance), it simultaneously compensates for the negative temperature coefficient that depends on the magnetic field and the positive temperature coefficient that depends on the residual voltage.
第1図は、本発明の実施例を示す。FIG. 1 shows an embodiment of the invention.
ホール効果半導体素子(2)に定電流回路(1)より一
定電流I を通電する。前記半導体素子(2)は、温度
上昇と ともに抵抗も増加する。 半導体素子のe0の
電位は、定電流駆動のためΔe0増加する。A constant current I is applied to the Hall effect semiconductor element (2) from the constant current circuit (1). The resistance of the semiconductor element (2) also increases as the temperature rises. The potential of e0 of the semiconductor element increases by Δe0 due to constant current driving.
残留電圧温度補償回路群(9)は、増加電圧Δe0分を
積分回路(4)と基準回路(4a)により加算器(6)
へ、 前記半導体素子(2)の出力起電圧は、インピー
ダンス変換器(5)をかいして加算器(6)へ接続され
る。The residual voltage temperature compensation circuit group (9) converts the increased voltage Δe0 into an adder (6) using an integrating circuit (4) and a reference circuit (4a).
The output electromotive voltage of the semiconductor element (2) is connected to an adder (6) via an impedance converter (5).
e2=RK・I・B/d+V(I・B0) (2)式e
3=−V(I・B0) (3)式
e2+e3=RK・I・B/d (4)式ゆえに残留電
圧の温度依存性のみ補償される。e2=RK・I・B/d+V(I・B0) (2) Formula e
3=-V(I·B0) (3) Equation e2+e3=RK·I·B/d (4) Therefore, only the temperature dependence of the residual voltage is compensated.
ホール係数RKの温度依存補償回路群(8)は、前記残
留電圧補償回路群と同様に、半導体素子のe0の増加電
圧Δe0を検出し、積分回路(3) 基準回路(3a)
により温度上昇による、ホール係数RKの減裏量を、増
幅回路(7)利得可変素子(7a)で増加しホール係数
の温度補償をする方法である。Similarly to the residual voltage compensation circuit group, the Hall coefficient RK temperature-dependent compensation circuit group (8) detects the increased voltage Δe0 of e0 of the semiconductor element, and integrates the integrating circuit (3) and the reference circuit (3a).
This is a method for temperature-compensating the Hall coefficient by increasing the amount of decrease in the Hall coefficient RK due to temperature rise using the amplifier circuit (7) and the variable gain element (7a).
第1図は本発明の一実施例、第2図は
無磁界時の残留電圧
Vout(1)=V(I・B0)
第3図は有磁界時の半導体素子の出力電圧Vout(2
)=RK I B/d+V(I・B0)第4図は半導
体素子の制御側抵抗の温度特性ホール係数RKの温度特
性。
グラフ(1):制御側抵抗
グラフ(2):ホール係数Fig. 1 shows an embodiment of the present invention, Fig. 2 shows the residual voltage Vout (1) = V (I・B0) in the absence of a magnetic field, and Fig. 3 shows the output voltage Vout (2) of the semiconductor element in the presence of a magnetic field.
)=RK I B/d+V (I・B0) Figure 4 shows the temperature characteristics of the control side resistance of the semiconductor element and the temperature characteristics of the Hall coefficient RK. Graph (1): Control side resistance graph (2): Hall coefficient
Claims (1)
路、基準電圧回路、積分回路と加算器からなる残留電圧
温度補償回路群と 2、半導体磁気変換素子のホール係数補償の基準電圧回
路、積分回路と利得可変回路からなるホール係数温度補
償回路群からなる補償方法。[Claims] 1. Residual voltage temperature compensation circuit group consisting of a constant current circuit, a reference voltage circuit, an integrating circuit, and an adder that supply a constant current to the semiconductor magnetic transducer; and 2. Hall coefficient compensation of the semiconductor magnetic transducer. A compensation method consisting of a Hall coefficient temperature compensation circuit group consisting of a reference voltage circuit, an integrating circuit and a variable gain circuit.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60005594A JPS61164278A (en) | 1985-01-16 | 1985-01-16 | Temperature compensation for semiconductor magnetic conversion element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60005594A JPS61164278A (en) | 1985-01-16 | 1985-01-16 | Temperature compensation for semiconductor magnetic conversion element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61164278A true JPS61164278A (en) | 1986-07-24 |
Family
ID=11615553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60005594A Pending JPS61164278A (en) | 1985-01-16 | 1985-01-16 | Temperature compensation for semiconductor magnetic conversion element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61164278A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104459580A (en) * | 2014-12-11 | 2015-03-25 | 重庆地质仪器厂 | Temperature compensation system |
CN106019180A (en) * | 2016-07-18 | 2016-10-12 | 北京航空航天大学 | Alkali metal atomic magnetometer air chamber electric heating magnetic field measurement method |
-
1985
- 1985-01-16 JP JP60005594A patent/JPS61164278A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104459580A (en) * | 2014-12-11 | 2015-03-25 | 重庆地质仪器厂 | Temperature compensation system |
CN106019180A (en) * | 2016-07-18 | 2016-10-12 | 北京航空航天大学 | Alkali metal atomic magnetometer air chamber electric heating magnetic field measurement method |
CN106019180B (en) * | 2016-07-18 | 2019-01-29 | 北京航空航天大学 | A kind of alkali metal atom magnetometer gas chamber electric heating Measurement Method for Magnetic Field |
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