JPS61164040U - - Google Patents
Info
- Publication number
- JPS61164040U JPS61164040U JP3244985U JP3244985U JPS61164040U JP S61164040 U JPS61164040 U JP S61164040U JP 3244985 U JP3244985 U JP 3244985U JP 3244985 U JP3244985 U JP 3244985U JP S61164040 U JPS61164040 U JP S61164040U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- hold
- angle
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Packaging Frangible Articles (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3244985U JPS61164040U (hu) | 1985-03-06 | 1985-03-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3244985U JPS61164040U (hu) | 1985-03-06 | 1985-03-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61164040U true JPS61164040U (hu) | 1986-10-11 |
Family
ID=30533972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3244985U Pending JPS61164040U (hu) | 1985-03-06 | 1985-03-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61164040U (hu) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013008920A (ja) * | 2011-06-27 | 2013-01-10 | Mitsubishi Electric Corp | ウェハカセット |
JPWO2015151377A1 (ja) * | 2014-03-31 | 2017-04-13 | パナソニックIpマネジメント株式会社 | 太陽電池セルの製造方法及びそれに用いる基板カセット |
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1985
- 1985-03-06 JP JP3244985U patent/JPS61164040U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013008920A (ja) * | 2011-06-27 | 2013-01-10 | Mitsubishi Electric Corp | ウェハカセット |
JPWO2015151377A1 (ja) * | 2014-03-31 | 2017-04-13 | パナソニックIpマネジメント株式会社 | 太陽電池セルの製造方法及びそれに用いる基板カセット |