JPS61163266A - Method for preventing rusting of rare earth element-iron type permanent magnet - Google Patents

Method for preventing rusting of rare earth element-iron type permanent magnet

Info

Publication number
JPS61163266A
JPS61163266A JP371185A JP371185A JPS61163266A JP S61163266 A JPS61163266 A JP S61163266A JP 371185 A JP371185 A JP 371185A JP 371185 A JP371185 A JP 371185A JP S61163266 A JPS61163266 A JP S61163266A
Authority
JP
Japan
Prior art keywords
permanent magnet
rare earth
protective film
earth element
iron type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP371185A
Other languages
Japanese (ja)
Inventor
Masahiro Aoe
青江 雅弘
Yoshihisa Tamura
佳久 田村
Nobuo Imaizumi
伸夫 今泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Namiki Precision Jewel Co Ltd
Original Assignee
Namiki Precision Jewel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Namiki Precision Jewel Co Ltd filed Critical Namiki Precision Jewel Co Ltd
Priority to JP371185A priority Critical patent/JPS61163266A/en
Publication of JPS61163266A publication Critical patent/JPS61163266A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To maintain the performance of a small-sized electronic appliance for a long period by coating the surface of a rare earth element-iron type permanent magnet with an oxidation inhibiting protective film having high adhesion by a PVD method such as vacuum deposition. CONSTITUTION:An R-Fe-M permanent magnet (R is Nd, Pr, Ce or Dy, and M is a metalloid element such as B or Si) liable to oxidize in the air is coated with an oxidation inhibiting protective film by a PVD method such as vacuum deposition, sputtering or ion plating. The protective film is made of a metal such as Ti, Cr or Ni, a metallic oxide, nitride, carbide or boride such as TiN or Al2O3. It is preferable that the magnet is heated especially at <=600 deg.C during PVD. By this method, a rust preventing effect can be produced while the magnet characteristics are restored.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、大気中で容易に酸化しやすい希土類鉄系永久
磁石の防錆方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for preventing rust of rare earth iron-based permanent magnets that are easily oxidized in the atmosphere.

[従来の技術] 希土類鉄系永久磁石において、特にR−Fe −M永久
磁石(RはNd、 Pr、 Ce、 Dyテあり、Mは
3、Si等のメタ1]イド元素である。)は、大気中で
容易に酸化しやすいため、小型電子機器等部品精度が要
求される部位、たとえば永久磁石を含む磁気回路にお(
)る磁気空隙は、このような永久磁石が組込まれている
場合、その表面が酸化されると磁気特性の劣化による実
質的な磁気空隙の変化によるパーミアンスの変動により
小型電子機器の性能を劣化させることが多い。
[Prior Art] Among rare earth iron-based permanent magnets, R-Fe-M permanent magnets (R is Nd, Pr, Ce, Dy, M is a meta-1]oid element such as 3, Si, etc.) are particularly suitable for rare earth iron-based permanent magnets. Because it is easily oxidized in the atmosphere, it is used in small electronic devices and other parts where precision is required, such as magnetic circuits containing permanent magnets.
) When such permanent magnets are incorporated, the performance of small electronic devices deteriorates due to permeance fluctuations due to substantial changes in the magnetic gap due to deterioration of magnetic properties when its surface is oxidized. There are many things.

そのため従来からCr、 Ni等を湿式メッキ手段にJ
:りその表面に被覆することにより酸化防止が31られ
てきた。
Therefore, J
: Antioxidation has been achieved by coating the surface of lithium.

[発明が解決しようとする問題点] しかし4【がら湿式メッキ手段は、メッキ前王程におい
では、脱脂、II化物除去工程の際に永久磁石自体の表
面が腐蝕されるために、メッキがされにくくなり、また
メッキ後においては、永久磁石界面とメッキ層間に空隙
が発生しやすくなるため、その部分から剥離が起きる。
[Problems to be Solved by the Invention] However, wet plating means does not allow plating because the surface of the permanent magnet itself is corroded during the degreasing and II compound removal steps before plating. Moreover, after plating, a gap is likely to occur between the permanent magnet interface and the plating layer, so peeling occurs from that part.

さらにピンホールから発錆しやずくなる欠点すあっ1こ
 。
Furthermore, there is one drawback: rust can easily form from pinholes.

本発明はこの点を考慮して、被覆層の密着性が良好であ
り、かつ活性な被被覆体に対して悪影響を及ぼさない防
錆方法を提供Jることを目的とする。
In consideration of this point, the present invention aims to provide a rust prevention method in which the adhesion of the coating layer is good and does not have an adverse effect on the active material to be coated.

[問題点を解決するための手段] 本発明は湿式メッキに対して、乾式メッキである真空蒸
着、スパッタリング、イオンプレーティング等のPVD
手段を用い、希土類鉄系永久磁石において、永久磁石自
体を加熱しながら上記PVD手段により酸化防止保護膜
をその表面に被覆するものである。酸化防止保護膜は主
として金属である口、 Cr、 Ni等や、金属酸化物
[Means for Solving the Problems] The present invention provides dry plating such as PVD such as vacuum evaporation, sputtering, and ion plating, as opposed to wet plating.
In a rare earth iron permanent magnet, the surface of the permanent magnet is coated with an anti-oxidation protective film by the PVD method while heating the permanent magnet itself. The antioxidant protective film is mainly made of metals, such as Cr, Ni, etc., or metal oxides.

窒化物、炭化物、TII化物、硅化物であるTiN。TiN is a nitride, carbide, TII compound, and silicide.

^’203等が挙げられる。加熱温度は600℃以下に
設定することが好ましい。この限定理由としては、61
0℃付近で希土類鉄系永久磁石の磁気特性の起因に大き
な影響を及ぼすFe−rich 。
Examples include ^'203. It is preferable to set the heating temperature to 600°C or less. The reason for this limitation is 61
Fe-rich has a large influence on the magnetic properties of rare earth iron permanent magnets at around 0°C.

B −rich 、 R−rich層の三相が三元共晶
ヲ形成Jるために、この温度以上に加熱してPVD手段
にJ:りTi、 Cr、旧、 TiN 、 Al103
を被覆すると、焼結粒子表面層に欠陥が発生し、保磁力
が劣化するためである。
In order for the three phases of the B-rich and R-rich layers to form a ternary eutectic, they are heated above this temperature and processed by PVD: Ti, Cr, old, TiN, Al103.
This is because if the sintered particles are coated with , defects will occur in the surface layer of the sintered particles and the coercive force will deteriorate.

[実施例1 本発明の一実施例として、真空蒸@装圏を用いて旧を被
覆した。チャンバー内を1.OX 10’Torr以上
に真空排気し、基板上の被被覆体である永久磁石を45
0°Cに加熱して、1000人7mtnで蒸着して、表
面に1源のNi相を形成した。第1図に被覆前の永久磁
石1と、従来の湿式メッキの永久磁石2と、本発明によ
るN1蒸着による永久磁石3の4πI −1−1磁気特
性曲線を示す。
[Example 1] As an example of the present invention, a vacuum evaporation chamber was used to coat the former. Inside the chamber 1. Evacuate to OX 10' Torr or higher, and remove the permanent magnet that is the covering on the substrate at 45°C.
It was heated to 0° C. and evaporated at 1000 7 mtn to form a single source Ni phase on the surface. FIG. 1 shows 4πI −1-1 magnetic characteristic curves of a permanent magnet 1 before coating, a conventional wet-plated permanent magnet 2, and a permanent magnet 3 deposited with N1 according to the present invention.

図面より明らかなように、被覆前の永久磁石は機械用]
二にJ:り減磁曲線の変形があるが、これがざらに湿式
メッキにより角型性が劣化するが、本発明によるI) 
V D手段による被覆処理により、本来の磁気特性が維
持されることがわかる。
As is clear from the drawing, the permanent magnet before coating is for mechanical use]
Second, J: There is a deformation of the demagnetization curve, which deteriorates the squareness due to wet plating, but according to the present invention I)
It can be seen that the original magnetic properties are maintained by the coating treatment by VD means.

[発明の効果] 、本発明により希土類遷移金属合金の中で、特に大気中
で容易に酸化しやずいR−Fe −M永久磁石(RはN
(1,Pr、 Cc、 Dyであり、MはJ3.Si等
のメタロイド元素である。)の表面酸化が防止されると
どもに、Ti、 Cr、旧あるいはTiN 。
[Effects of the invention] The present invention provides an R-Fe-M permanent magnet (R is N
(1, Pr, Cc, Dy, and M is a metalloid element such as J3.Si), while preventing surface oxidation of Ti, Cr, old or TiN.

Al2O3層が緻密で強固に形成されるため、被覆層に
よる腐蝕あるいは剥離が発生しないので、小型電子機器
の性能を長期間にわたり維持できるようになった。また
300℃以上に加熱した場合は、加工歪を取りながら被
覆処理を行なうので、磁石特性を回復さUながら防錆効
果をもたすことができる。実際例としては、偏平モータ
ー用マグネッ1〜は磁気空隙とアーマチュアコイルとの
軸方向の関係が重要であり、マグネット表面が腐蝕され
ると磁気空隙が変化したり、アーマデユアコイルを傷付
けることがあり、モータの特性を劣化させるため、本発
明による処理は効果的であった。
Since the Al2O3 layer is dense and strong, corrosion or peeling of the coating layer does not occur, making it possible to maintain the performance of small electronic devices for a long period of time. In addition, when heating to 300° C. or higher, the coating treatment is performed while removing processing strain, so that it is possible to restore the magnetic properties while providing a rust-preventing effect. As an actual example, for flat motor magnets 1~, the axial relationship between the magnetic gap and the armature coil is important, and if the magnet surface corrodes, the magnetic gap may change or the armature coil may be damaged. However, the treatment according to the present invention was effective because it deteriorated the characteristics of the motor.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は永久磁石の4πI −1−1磁気特性曲線を示
す。 1:被覆前の永久磁石によるもの。 2:湿式メッキの永久磁石によるもの。 3:Ni蒸着による永久磁石によるもの。
FIG. 1 shows a 4πI −1-1 magnetic characteristic curve of a permanent magnet. 1: By permanent magnet before coating. 2: Wet-plated permanent magnet. 3: Using a permanent magnet formed by Ni vapor deposition.

Claims (3)

【特許請求の範囲】[Claims] (1)希土類鉄系永久磁石において、真空蒸着、スパッ
タリング、イオンプレーティングのPVD手段により酸
化防止保護膜をその表面に被覆することを特徴とする希
土類鉄系永久磁石の防錆方法。
(1) A method for preventing rust of a rare earth iron permanent magnet, which comprises coating the surface of the rare earth iron permanent magnet with an antioxidant protective film by PVD means such as vacuum evaporation, sputtering, or ion plating.
(2)永久磁石自体を加熱しながらPVD処理を行なう
特許請求の範囲第(1)項記載の希土類鉄系永久磁石の
防錆方法。
(2) A method for preventing rust of a rare earth iron-based permanent magnet according to claim (1), wherein the PVD treatment is performed while heating the permanent magnet itself.
(3)加熱温度は600℃以下に設定した特許請求の範
囲第(2)項記載の希土類鉄系永久磁石の防錆方法。
(3) A method for preventing rust of a rare earth iron-based permanent magnet according to claim (2), wherein the heating temperature is set to 600° C. or lower.
JP371185A 1985-01-12 1985-01-12 Method for preventing rusting of rare earth element-iron type permanent magnet Pending JPS61163266A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP371185A JPS61163266A (en) 1985-01-12 1985-01-12 Method for preventing rusting of rare earth element-iron type permanent magnet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP371185A JPS61163266A (en) 1985-01-12 1985-01-12 Method for preventing rusting of rare earth element-iron type permanent magnet

Publications (1)

Publication Number Publication Date
JPS61163266A true JPS61163266A (en) 1986-07-23

Family

ID=11564913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP371185A Pending JPS61163266A (en) 1985-01-12 1985-01-12 Method for preventing rusting of rare earth element-iron type permanent magnet

Country Status (1)

Country Link
JP (1) JPS61163266A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61166116A (en) * 1985-01-18 1986-07-26 Sumitomo Special Metals Co Ltd Manufacture of permanent magnet of excellent corrosion-resisting property
JPS61166117A (en) * 1985-01-18 1986-07-26 Sumitomo Special Metals Co Ltd Manufacture of permanent magnet of excellent corrosion-resisting property
JPS61166115A (en) * 1985-01-18 1986-07-26 Sumitomo Special Metals Co Ltd Manufacture of permanent magnet of excellent corrosion-resisting property

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61166116A (en) * 1985-01-18 1986-07-26 Sumitomo Special Metals Co Ltd Manufacture of permanent magnet of excellent corrosion-resisting property
JPS61166117A (en) * 1985-01-18 1986-07-26 Sumitomo Special Metals Co Ltd Manufacture of permanent magnet of excellent corrosion-resisting property
JPS61166115A (en) * 1985-01-18 1986-07-26 Sumitomo Special Metals Co Ltd Manufacture of permanent magnet of excellent corrosion-resisting property

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