JPS61163164U - - Google Patents

Info

Publication number
JPS61163164U
JPS61163164U JP3244885U JP3244885U JPS61163164U JP S61163164 U JPS61163164 U JP S61163164U JP 3244885 U JP3244885 U JP 3244885U JP 3244885 U JP3244885 U JP 3244885U JP S61163164 U JPS61163164 U JP S61163164U
Authority
JP
Japan
Prior art keywords
piston
wafer
spring
cylinder
attracted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3244885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3244885U priority Critical patent/JPS61163164U/ja
Publication of JPS61163164U publication Critical patent/JPS61163164U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP3244885U 1985-03-06 1985-03-06 Pending JPS61163164U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3244885U JPS61163164U (it) 1985-03-06 1985-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3244885U JPS61163164U (it) 1985-03-06 1985-03-06

Publications (1)

Publication Number Publication Date
JPS61163164U true JPS61163164U (it) 1986-10-09

Family

ID=30533970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3244885U Pending JPS61163164U (it) 1985-03-06 1985-03-06

Country Status (1)

Country Link
JP (1) JPS61163164U (it)

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