JPS61163124U - - Google Patents
Info
- Publication number
- JPS61163124U JPS61163124U JP4558985U JP4558985U JPS61163124U JP S61163124 U JPS61163124 U JP S61163124U JP 4558985 U JP4558985 U JP 4558985U JP 4558985 U JP4558985 U JP 4558985U JP S61163124 U JPS61163124 U JP S61163124U
- Authority
- JP
- Japan
- Prior art keywords
- guide rail
- stage moving
- stage
- feed nut
- moving device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4558985U JPS61163124U (fr) | 1985-03-28 | 1985-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4558985U JPS61163124U (fr) | 1985-03-28 | 1985-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61163124U true JPS61163124U (fr) | 1986-10-09 |
Family
ID=30559218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4558985U Pending JPS61163124U (fr) | 1985-03-28 | 1985-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61163124U (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58177244A (ja) * | 1982-04-13 | 1983-10-17 | Nachi Fujikoshi Corp | 静圧スライドテ−ブルの送り装置 |
-
1985
- 1985-03-28 JP JP4558985U patent/JPS61163124U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58177244A (ja) * | 1982-04-13 | 1983-10-17 | Nachi Fujikoshi Corp | 静圧スライドテ−ブルの送り装置 |