JPS61163124U - - Google Patents
Info
- Publication number
- JPS61163124U JPS61163124U JP4558985U JP4558985U JPS61163124U JP S61163124 U JPS61163124 U JP S61163124U JP 4558985 U JP4558985 U JP 4558985U JP 4558985 U JP4558985 U JP 4558985U JP S61163124 U JPS61163124 U JP S61163124U
- Authority
- JP
- Japan
- Prior art keywords
- guide rail
- stage moving
- stage
- feed nut
- moving device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Description
第１図ないし第３図はそれぞれこの考案の別の
実施例を示す一部の斜視図、第４図は従来のステ
ージ移動装置の斜視図である。
各図中、同一符号は同一または相当部分を示し
、２はステージ、８，２１〜２４はガイドレール
、９はステージ移動部、１２は送りナツト、１３
は送りねじである。
1 to 3 are partial perspective views showing other embodiments of this invention, and FIG. 4 is a perspective view of a conventional stage moving device. In each figure, the same reference numerals indicate the same or equivalent parts, 2 is the stage, 8, 21 to 24 are guide rails, 9 is a stage moving part, 12 is a feed nut, 13
is the lead screw.
Claims (1)
るようにされたステージと、このステージを移動
させるように接続しかつ第１のガイドレールに沿
つて摺動するステージ移動部と、前記第１のガイ
ドレールに対してほぼ平行に設けられた送りねじ
と、この送りねじにかみ合つて移動する送りナツ
トと、前記ステージ移動部および送りナツトを摺
動可能に連結する第２のガイドレールとを備えた
ステージ移動装置。 (2) 第２のガイドレールがステージ移動部およ
び送りナツトを直接または間接的に連結するもの
である実用新案登録請求の範囲第１項記載のステ
ージ移動装置。 (3) 第２のガイドレールがステージ移動部およ
び送りナツトを垂直方向および水平方向の１また
は２方向に移動可能に連結するものである実用新
案登録請求の範囲第１項または第２項記載のステ
ージ移動装置。 (4) 第２のガイドレールが送りナツトを垂直方
向（または水平方向）に移動させるガイドレール
と、このガイドレールを水平方向（または垂直方
向）に移動させるガイドレールとを含む実用新案
登録請求の範囲第１項ないし第３項のいずれかに
記載のステージ移動装置。[Claims for Utility Model Registration] (1) A stage to which a material to be processed is attached and is movable on a base, and the stage is connected so as to be movable and slides along a first guide rail. A stage moving part, a feed screw provided substantially parallel to the first guide rail, a feed nut that moves in engagement with the feed screw, and the stage moving part and the feed nut are slidably connected. A stage moving device comprising a second guide rail. (2) The stage moving device according to claim 1, wherein the second guide rail connects the stage moving part and the feed nut directly or indirectly. (3) The utility model registration claim 1 or 2, wherein the second guide rail connects the stage moving part and the feed nut movably in one or two directions, vertically and horizontally. Stage moving device. (4) A utility model registration request in which the second guide rail includes a guide rail that moves the feed nut vertically (or horizontally) and a guide rail that moves this guide rail horizontally (or vertically). The stage moving device according to any one of ranges 1 to 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4558985U JPS61163124U (en) | 1985-03-28 | 1985-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4558985U JPS61163124U (en) | 1985-03-28 | 1985-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61163124U true JPS61163124U (en) | 1986-10-09 |
Family
ID=30559218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4558985U Pending JPS61163124U (en) | 1985-03-28 | 1985-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61163124U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58177244A (en) * | 1982-04-13 | 1983-10-17 | Nachi Fujikoshi Corp | Feeder of static pressure slide table |
-
1985
- 1985-03-28 JP JP4558985U patent/JPS61163124U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58177244A (en) * | 1982-04-13 | 1983-10-17 | Nachi Fujikoshi Corp | Feeder of static pressure slide table |
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