JPS61162052U - - Google Patents
Info
- Publication number
- JPS61162052U JPS61162052U JP4443785U JP4443785U JPS61162052U JP S61162052 U JPS61162052 U JP S61162052U JP 4443785 U JP4443785 U JP 4443785U JP 4443785 U JP4443785 U JP 4443785U JP S61162052 U JPS61162052 U JP S61162052U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- holding hole
- external hatch
- planet
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4443785U JPS61162052U (enExample) | 1985-03-27 | 1985-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4443785U JPS61162052U (enExample) | 1985-03-27 | 1985-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61162052U true JPS61162052U (enExample) | 1986-10-07 |
Family
ID=30557007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4443785U Pending JPS61162052U (enExample) | 1985-03-27 | 1985-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61162052U (enExample) |
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1985
- 1985-03-27 JP JP4443785U patent/JPS61162052U/ja active Pending