JPS61161527A - Pressure responsive controller - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION TECHNICAL FIELD This invention relates to pressure sensitive control devices and, more particularly, to pressure sensitive control devices that utilize a calibrated jump actuated diaphragm responsive to a predetermined sensed pressure.

BACKGROUND OF THE INVENTION Fluid pressure sensitive control devices using jump actuated diaphragms to actuate switches or the like are widely used for a variety of pressure control functions. For example, this type of control device is used in a refrigeration system to control the operation of a refrigerant compressor in response to the sensed pressure of the refrigerant in the system. Devices of this type must be small, inexpensive, accurate, and reliable in order to capture the market.

Pressure control devices of this type are often used to cycle the controlled device and respond when a preset high pressure level is reached or when a preset low pressure level is reached. For example, when controlling an air conditioner according to the sensed pressure of a refrigerant compressor, the control device senses that the refrigerant pressure in the condenser has reached a preset high pressure and operates to stop the operation of the refrigerant compressor. . When the sensed condenser refrigerant pressure reaches a predetermined low pressure level, the controller operates accordingly to operate the compressor again.

A typical pressure-sensitive, jump-actuated diaphragm is an internally stressed thin leaf spring disc with a central dish. When a sufficiently large pressure difference is applied to the diaphragm in a direction that flattens the dish, the dish suddenly moves, or jumps, and assumes a second position beyond the center plane of the diaphragm, causing its central The part becomes dish-shaped on the opposite side. When the pressure difference falls to a sufficiently low level, the dish will jump back over the central plane to its starting position. Movement of the diaphragm is typically transmitted mechanically to the switch or valve.

The level of high pressure that causes movement in the diaphragm can be varied by changing the configuration of the diaphragm plate. The deeper the dish, the greater the pressure differential required to move the diaphragm. Rubbing the dish flat allows the diaphragm to respond with a relatively small pressure difference.

The low pressure level at which the diaphragm returns to its original position is controlled by limiting the extent to which the dish moves beyond the central plane. Once the dish has moved sufficiently beyond the center plane, a relatively low differential pressure is required to return the diaphragm to its initial position. If the dish moves just beyond the center plane, it will return only when a relatively large differential pressure is encountered.

In order to accurately respond to predetermined high and low pressure levels, pressure control devices are individually calibrated during manufacture. The method involves assembling the control system, applying operating pressure to it, and then mechanically cooling each assembly in a controlled manner until the diaphragm applies the desired pressure level and moves forward. It is.

A typical pressure control device as described above includes a casing forming a chamber communicating with the pressure source to be controlled, a diaphragm sealing the chamber, a switch fixed to the casing, and a diaphragm. A motion transmission element between the switches is used. Although the diaphragm is typically welded directly around its circumference to the casing or diaphragm support, in some instances the diaphragm is simply sealed in place without welding and constraining the diaphragm's circumference.

Control systems have also been proposed that utilize adjustment screws, bias springs, and other relatively complex designs to allow high and low pressure actuation to be calibrated during manufacturing. These proposals have resulted in equipment that is too expensive for widespread use, especially for applications that do not require a very high degree of precision. U.S. Pat. No. 4,220,836 discloses an example of a control system that allows for calibration of high and low pressure levels during manufacturing.

Simple designs have also been proposed in which the controller is assembled and then subjected to mechanical deformation for calibration.

One proposal was to apply a very large overpressure to the fluid introduced into the casing. The forces created by this overpressure condition were to deform the diaphragm or its support beyond its yield point into the desired configuration.

Other proposals have included methods for calibrating the control device, and control devices having a structure that allows the diaphragm or its support to be permanently deformed and bent by mechanical methods. Although this type of proposal has been able to simplify the structure of the control device, it has tended to result in poor production yields due to inaccuracies in the calibration process.

In some instances, the diaphragm and support were so stressed that they yielded too much and did not respond to the desired pressure levels. In many designs, once overstress occurs,
Recalibration of the device was not possible. In other instances, the modifications necessary to adjust the high pressure level also caused changes in the low pressure level to which the device responded. The opposite also happened. If the control device could not be calibrated, the entire device had to be scrapped or remanufactured.

DISCLOSURE OF THE INVENTION The present invention provides a method for fabricating, assembling, and calibrating a pressure sensitive module prior to assembly into a control device, thereby simplifying the structure of the control device and responding accurately to a desired pressure level. A new and improved pressure sensitive control device is provided which substantially eliminates low production yields due to calibration problems.

An important feature of the invention is the construction of the pressure sensitive module, which includes a jump-actuated diaphragm, a diaphragm support plate to which the diaphragm is mounted in a gas-tight manner, and a base which connects the support plate to the case of the pressure device.

The diaphragm support plate includes a ninth support region that securely maintains the supported diaphragm about its central plane, and a diaphragm control region that surrounds the support region and to which the diaphragm is hermetically joined. A support plate between the support region and the control region is permanently deformed to allow controllable positioning of the control region relative to the support region and to enable calibration of the high pressure level to which the control device responds. .

A preferred pressure control device includes a second control region surrounded by and connected to the support region by a permanently deformed portion relative to the support region to determine the low pressure level to which the diaphragm responds. It has a second control area that can control the position of.

After modifying the tire flamm support area to control the pressure response of the diaphragm, the module is hermetically joined to the control device via the module base. The module base is constructed and arranged so that the stresses generated by connecting the base to the casing are not applied to the diaphragm and support plate.

In the illustrated preferred embodiment of the invention, the diaphragm support plate region is hermetically joined to the base member. The base member rigidly supports the support region in the central plane of the diaphragm. The plate part that can undergo permanent deformation can change the position of the control a castle with respect to the support area during calibration, but each deformable part has almost no contact with the support area and the remote control area during calibration. It is designed to have no effect. Ninth, the calibration of the high pressure level and the low pressure level can be performed substantially independently of each other.

(Best Embodiment of the Invention) A pressure control device 10f according to the invention is shown in FIG. The illustrated pressure control device 10 is used, for example, in a refrigeration device to sense the refrigerant pressure level in the condenser of the device and respond to this by causing an electric motor-driven refrigerant compressor to perform cycle operation. be. The device 10 is in communication with the refrigerant in the condenser at 2v.

When the refrigerant pressure reaches the preset higher pressure level,
Controller 10 senses this pressure level and interrupts compressor operation. When the sensed refrigerant pressure reaches a preset low pressure level, the controller IO responds by restarting the compressor.

The control device 10 includes a pressure housing assembly 12 configured to communicate with the refrigerant of the refrigeration system, a control switch assembly 14 electrically connected to the compressor motor control circuit, and the housing assembly 12 and the switch. A pressure sensitive module 16 is provided as a pressure transducer between the assembly 14 and the assembly 14.

The housing assembly 12 includes an internal pressure chamber 24t-
The pot-like casing 22c that forms has a suitable fitting 20 which is fitted in a gas-tight manner. The fitting 20 may be of any suitable construction and may be of conventional construction. The one shown is formed with a body having an internally threaded passageway 26 to a pressure transmission port 28 through a projection 30 at the end of the body. A refrigerant pressure transmission metal tube (not shown) is threaded and sealed within the fitting 20 to transmit refrigerant pressure from the refrigeration system to the control device.

The casing 22 is shaped like a socket formed from drawn stainless steel and has a base 32, a cylindrical sidewall 34 extending from the base, and an outwardly flared mounting flange 36 at the end of the socket sidewall opposite the base. desirable. base 32
has an opening through which the pipe fitting protrusion 30 extends. The protrusion 30 is then upset and caulked to the tip base 32. The pipe fitting is brazed to the casing 22 around its protrusion so that the joint between the pipe fitting and the caisson is airtight.

The control switch assembly 14 includes a molded plastic tip-shaped switch case 40't supporting a switch assembly 42' therein. Plastic cover part 4
4 is located at the open end of the switch case and forms a central opening through which a switch operating pin 46 formed of an insulating material passes. Actuation pin 46 transmits switch actuation motion between pressure sensitive module 16 and switch assembly 42 .

The switch assembly 42 is fixed to the switch case 7j
[Formed by child bars 50.52.]

The terminal bar 50 has a fixed contact 54 for a switch.
? The terminal bar 52 is provided at the overhanging end of the conductive cantilever type elastic blade 58 and is connected to the movable contact 56 of the companion switch.
fr: I support it.

In the preferred control system, terminals 50.52 extend through openings in the closed end of switch case 42 and are snapped into position relative to the case.
52 protrudes from the closed end of the case 42 (not shown) and is connected to a circuit for controlling and energizing the refrigerant compressor. When the switch contacts are contacted as shown in Figure 1, the switch assembly 42 conducts and operates the refrigerant compressor. As the blades 58 move away from the pressure sensitive module 16, the switch contacts open and the compressor control circuit is shut off.

The pressure sensitive module 16 hermetically closes the chamber 24t and includes the ability to sense the total refrigerant pressure within the chamber and actuate a control switch assembly 42t in response. In the illustrated preferred embodiment 2, the pressure sensitive module includes a diaphragm 60, a diaphragm control plate 62 hermetically joined to the diaphragm, and a support supporting the control plate and hermetically coupling the control plate to the casing 22. member 64
It is equipped with. Since a pressure equal to or close to atmospheric pressure is placed within the switch case 40, the module is subject to a differential pressure that varies with fluctuations in refrigerant pressure in the refrigerant system.

The diaphragm 60 is a thin metal spring plate, and the rotation of the central dome portion 68 is initially a flat annular portion 66. The diaphragm is internally stressed such that if there is no pressure differential on either side of the diaphragm, the dome portion 68 will bulge to the position shown in FIG. When a pressure differential is applied on either side of the diaphragm in a direction that flattens the dome (i.e., as the pressure within chamber 24 increases relative to the surrounding atmospheric pressure), the dome will flatten until a predetermined pressure differential level is reached. It remains mostly still, but then the dome makes a sudden jump motion and moves beyond the plane of the annulus 66.
The curvature of the dome portion takes a second position with the same number. The dome 68 remains in the second position until the pressure differential across the diaphragm has decreased to a predetermined low pressure level, at which time the dome springs back to its initial position.

The pressure level within the chamber at which the dome section 68 moves is determined by the internal stress within the diaphragm, which stress is governed by the configuration of the diaphragm control plate 62. control board 6
2 includes a support 70 for securing and supporting the diaphragm 60 in a central plane generally indicated by the reference numeral 72;
0t - Surrounding first diaphragm control section 74 and support section 70
There is a ninth second diaphragm control section 76 surrounded by. After assembling the diaphragm to the control plate, the control plate undergoes controlled deformation to position the controls so that the diaphragm dominates the differential pressure moving between its positions.

The control area 74 is formed by the annular outer periphery of the control plate, and is continuously and airtightly welded to the outer periphery of the diaphragm 60. The control area is weakly connected to the support plate part 80 so that it can be deformed, so that during calibration, the control area 74 & the support area can be connected without significant deformation or change in the position of the support area or the control area. ' A controlled movement can be given to the area 70. In the preferred embodiment, the weakened plate 80 is formed by a circumferential groove or indentation surrounding the support area.

The control area 74 and the diaphragm part supported thereon project entirely into the pressure chamber 24 outside the support area. This feature ensures that the high pressure chamber fluid completely surrounds the control region 74 and the periphery of the diaphragm, so that unbalanced pressures are not applied to the control region 74.

Thus, during use of the control device 10, there is no tendency for the high pressure fluid in the chamber 24 to permanently deform the control region from its calibrated position.

The second diaphragm control region 76 has a central opening 84 in the plate.
It is formed by a completely surrounding surface 82 that abuts the dome. Surface 82 abuts the dome portion around opening 84 to limit the jumping movement of the diaphragm dome portion from position t and to define a second full position of the dome portion. The control section 76 is connected to a plate section 86 whose strength is weakened and can be permanently deformed. This plate part 86 allows the position f to be changed so that the entire second control area can be controlled with respect to the support area without causing any major deformation or change in position of the support area or the first control area 74 during calibration. be able to.

In a preferred control system, this strength can be weakened and fcf
Shapeable plate 86 is formed by spokes 92 extending between support region 70 and surface 82 . Spokes 92 support surface 82 in a cantilevered fashion and can undergo controlled deformation to determine the position of surface 82. The illustrated spokes are formed of nine equally spaced spokes extending through the plate and radially inward of the support. The spokes weaken the plate 86 to the extent that it can deform its surface relative to the support area during calibration, but sufficiently to withstand deformations as a result of the actuation pressures experienced during use of the control device. It has strength.

If it is desired to reduce the strength and increase the deformability of the shielding plate part, a shallow circumferential groove or cut is made between the support area 70 and the control area 76.
It is also possible to provide this control area along the joint line.

The weakened plates 80', 86 are shown in FIG. 1 deformed such that their associated control areas 74, 76 are sufficiently spaced from the plane 72.

For illustration purposes, the deformations are somewhat exaggerated.

The support region 70 firmly supports the majority of the diaphragm portion 66 in full contact at the central plane 72 . The pressure difference between the chamber 24 and the surrounding atmosphere of the control device keeps the diaphragm at the support 7 during normal operation of the control device.
0 surface, and the diaphragm remains in a stable position.

It is preferable that the base member 64 is made of a chip-shaped sheet metal and is airtightly joined to the control plate 62, and has a structure and arrangement such that it is airtightly attached to the casing 22 when the control device IO is assembled. The base member 64 includes a first main body portion 100 that is attached to a plate portion 70 with an airtight guard and firmly supports the plate portion 70, and a casing 22.
The second main body part 102 has a structure to be attached to the second main body part 102, and a generally cylindrical side wall 104 with no holes connecting the part 100 and the part 1 (32).

Body portion 100 is preferably formed by an annular flange projecting radially inwardly from body sidewall 104 .

The two langes form a surface 106 facing the mating support region 70 that abuts and supports the support region 70 . In a preferred embodiment, surface 106 corresponds in size and shape to support region 70 such that support region 70 is substantially supported by surface 106. The surface 106 and the support region 70 are joined by a continuous circumferential hermetic weld approximately in the center of the support region 70 . Weld joint 108 is preferably formed by resistance welding, but could be formed by other suitable welding techniques. .

The body portion 102 forms a mounting flange that projects radially outwardly from the sidewall 104 to provide a flat, rigid switch assembly mounting surface 109, and the outer periphery 110 faces and attaches to the casing flange 364. come into contact with 2 lunge 3
6 and the peripheral edge 110 of the main body 1020 are hermetically joined by continuous circumferential welding (preferably plasma welding). Since the chamber 24 is subjected to refrigerant pressure, the weld joint between the two flange 36 and the peripheral portion 110 must have a high degree of fracture strength. Therefore, relatively large, high-strength welded joints must be made between these parts.

In the illustrated embodiment, a switch mounting ring 112 is welded to the flange periphery 110 and folded onto the switch casing to complete the control device.

The junction between the switch assembly and module 16 is not hermetically sealed and is therefore inherently exposed to ambient atmospheric pressure, with the exception of chamber 24. Preferred control devices are often botted. That is, the switch casing and related parts are coated with a suitable compound, which seals the interior of the control device from the surroundings.

Atmospheric air within the device is contained by the potting agent so that the interior of the control switch casing remains at or near atmospheric pressure in most situations in which the device is used.

The key to this invention is the construction of the module 16, which allows for calibration prior to assembly into the module gold casing 22. The module 16 is fabricated by first welding the diaphragm to the control plate and then welding the control plate to the support body. Although support region 70 and control region 74 are preferably flat and coplanar at this point of articulation, control region 76 is initially deformed away from support region 70 and away from the diaphragm.

The assembled module is then placed in a calibrated pressure chamber with body flange 102 sealing the chamber from ambient atmospheric pressure so that a controlled pressure differential can be applied to the diaphragm. The pressure in the pressure chamber is raised to a high pressure level at which the diaphragm springs into contact with surface 824. This pressure is compared to the pressure at which the switch contacts open to release the pressure in the chamber.

The molding die is pushed into contact with the diaphragm and the control area, causing a permanent deformation sound in the weakened control plate section 80, and changing the relative position of the control area 74 with respect to the support area. The control plate is gradually permanently deformed so that the control area 74 has a slightly conical shape. This changes the stress on the diaphragm to reduce the internal spring tension that resists diaphragm movement. Pressure is again applied to the calibration chamber and the diaphragm jumps to measure the new pressure level hitting surface 82. As the diaphragm moves at a pressure level higher than the desired calibrated pressure level, this deformation procedure is repeated to further deform control region 74. This process is repeated until the device responds at the desired calibrated pressure level.

To calibrate the low pressure operating level, reduce the pressure in the calibration chamber until the diaphragm springs off surface 82. This pressure is compared to the pressure level at which the diaphragm should move away from surface 82. If the pressure level is too low (and it should be), another forming die is inserted against control region 76 to permanently deform plate 86 in the direction of the diaphragm.

The pressure in the pressure chamber is then increased until the diaphragm again abuts surface 82, and then decreased until the diaphragm again springs away from surface 82. This pressurization-deformation procedure is repeated as necessary until the control area 76 changes relative position to the support area such that the dome portion jumps away from the surface 82 at the desired calibrated pressure level.

To confirm this calibration, the pressure chamber pressure is then cycled between a high calibrated pressure level and a low pressure level. If the diaphragm does not respond at the desired calibrated pressure level, the diaphragm can be caused to respond at the calibrated pressure level by striking one or both molding dies against the diaphragm control plate again. .

If the low pressure level to which the diaphragm responds is too high than the desired pressure level, the module 16 can be taught a sufficiently high pressure tone in the calibration chamber to move the diaphragm to the control region 76.
The control region can be deformed away from the center plane 72 by contacting the center plane 72 . This deformation reduces the low pressure level to which the diaphragm responds.

The diaphragm control plate portion with weakened strength is located in the control area 74.
．． This helps to prevent deformation of 76 from extending to support area 70 . This is particularly important since if this were not the case, deformation of either control region would be accompanied by twisting or dishing of the support region and the other control region.

After calibration is complete, the module 16 is removed from the calibration chamber and stored in storage until needed for production. At the point of need, the fully assembled and calibrated pressure sensitive module 16 is circumferentially and hermetically welded to the casing flange 36.

Since the welded joint must be extremely strong, welding requires sufficient application of relatively high heat. Differences in thermal expansion and contraction of the diaphragm and support plate will adversely affect calibration, so after calibration, it is necessary to prevent excessive heat from being applied to the diaphragm and support plate while welding the module to the pressure casing flange. be. As a friend, the support part 64
is made by punching out relatively thin stainless steel with a relatively low heat conductivity, and has strong resistance to heat conduction from this welded part to the diaphragm plate. Furthermore, the support attachment 7 flange and the same cylindrical sidewall 104 serve to provide a relatively long heat flow path between the weld joint and the diaphragm support, which further reduces heating of the diaphragm and support plate.

[Brief explanation of the drawing]

FIG. 1 is an elevational view of a control device embodying the present invention, with a portion cut away and parts shown in cross section. FIG. 2 is a view from the foot, generally indicated by line 2--2 in FIG. [Numbers in the figure] 10 Pressure control device 12 Housing assembly 16 Pressure sensitive module 22 Casing 24 Pressure chamber 60 Diaphragm 62 Diaphragm control plate 66 Annular part 68 Dome part 70 Support area

Claims (12)

[Claims] (1) A pressure control device comprising a diaphragm supported on the center plane of the diaphragm, a diaphragm control plate that supports the diaphragm, and a base member that connects the control plate and diaphragm to a casing of a control device. a) the diaphragm has a periphery hermetically joined to the control plate and a first predetermined pressure sensitive module applied to the diaphragm; movable from a first position on one side of said central plane to a second position on an opposite side of said central plane in response to a second predetermined differential pressure applied to said diaphragm; (b) the diaphragm control panel includes: i) a central dome that is movable in a jumping manner from said second position to said first position; a support area for supporting; ii) hermetically bonded to a peripheral edge of said diaphragm and surrounding said support area; a permanent deformation between said support region and said control region such that said permanent deformation causes said diaphragm to move in position relative to said support region so as to move from said first position at said diaphragm; iii) a first diaphragm control area surrounded by said support area and forming a diaphragm abutment surface against which said diaphragm dome abuts in said second position; Said dome portion is permanently deformed into a support area to position said dome abutment surface such that said dome portion is capable of jumping from said second position at said second predetermined pressure. comprising a second diaphragm control region in which the second control plate is permanently deformed between the support region and the control region together with the second control region whose position has been moved relative to the support region; c) The base member is airtightly attached to the control device casing and a first body portion that is airtightly bonded to the support area to fixedly position the support area with respect to the central plane of the diaphragm. a second body portion of the structure remote from said first body portion; and a non-perforated body side wall between said first body portion and said second body portion; A pressure sensitive module characterized by: (2) The peripheral edge of the diaphragm and the first control area project outward from the support area and the first body, so that differential pressure is not applied to the first control area. A pressure sensitive module according to claim 1. (3) Furthermore, a permanently deformable plate part with weakened strength is provided between the support area and the first control area, and the weakened part is made more rigid by the main body member. Claim 1, wherein the first control area can be permanently deformed to enable the position movement by permanent deformation of the first control area without being affected by the position movement of the control area while being supported by the control area. Pressure sensitive module as described in Section. (4) The control plate has another permanently deformable plate between the support area and the second control area, and the deformable part is such that the support area is connected to the second control area. 4. The pressure sensitive module according to claim 3, wherein the pressure sensitive module is not affected by positional movement of the control area. (5) A pressure sensitive module comprising a diaphragm, a diaphragm control plate surrounding the diaphragm, and a main body member for connecting the pressure sensitive module to a pressure control device, a) The diaphragm is airtightly attached to the control plate. an outer peripheral portion attached to the diaphragm, and a central dome portion that is movable in an inverted dish-like manner between opposite sides of the diaphragm center plane in response to a differential pressure applied to the diaphragm; b) said control plate is i) a rigid support area abutting said diaphragm and fixing it in position relative to said central plane, said support area being firmly fixed to said body member; ii) a first diaphragm control region surrounding said support region and to which said diaphragm is hermetically secured; and iii) weakening the strength between said support region and said first diaphragm control region. This weakened plate portion adjusts the position of said first control region relative to said center plane to apply stress to said diaphragm dome portion in response to a predetermined pressure difference. iv) a second diaphragm control region surrounded by said support region, said control region being in contact with said diaphragm dome portion, and a second diaphragm applied to said diaphragm; positioning said diaphragm dome portion with respect to said central plane to stress said dish portion in response to a predetermined pressure difference of said support region and said second portion; A second weakened portion between the diaphragm control region and the second weakened portion is permanently deformed to position the second control region with respect to the central plane. and vi) coextensive with said support area, making said support area rigid against deflection with respect to said central plane when forming said first and second weakened parts; 1. A pressure sensitive module comprising: a main body member forming a supporting surface and having an outer peripheral portion configured to be attached to a casing of a control device in an airtight manner. (6) The support area is a flat ring having a first surface for supporting the annular portion of the diaphragm surrounding the dome group and a second surface in surface contact with the main body member support surface. 6. The module according to claim 5, wherein the main body member support surface and the second support region are continuous and hermetically joined on the circumference by welding. (7) The main body member is made of a relatively thin metal plate material with relatively low thermal conductivity, and the edge attachment structure is suitable for welding to the casing. module. (8) A) A pressure housing assembly forming a pressure chamber; B) An actuation control device fixed to the housing; C) A pressure-sensitive diaphragm that performs a jumping operation; and a support area that firmly supports the diaphragm. and a diaphragm control region permanently deformed relative to the support region for positioning the control region to stress the diaphragm and determine a chamber pressure level at which the diaphragm moves. a diaphragm control plate hermetically bonded to the diaphragm control plate; and a support member hermetically bonded to and supporting the support area and spaced apart from the support area. A pressure sensitive control device comprising: a pressure conversion module that hermetically closes a pressure chamber; (9) a second diaphragm control plate area surrounded by said support area, said control plate being deformably weakened between said second control area and said support area; said deformable weakened portion is capable of positioning said second control region relative to said support region to determine the degree of movement of said diaphragm. 9. A control device according to claim 8, wherein the control device is permanently deformed to allow the control device to be permanently deformed. (10) The control according to claim 8, wherein the control region and the portion of the diaphragm supported by the control region protrude into the pressure chamber so that no differential pressure is applied during operation of the control device. Device. (11) A) A casing forming a pressure chamber;
b) i) a pressure-sensitive diaphragm forming a central dome and a peripheral edge surrounding it; ii) an annular flat support area that firmly supports the diaphragm peripheral edge in the central plane of the diaphragm; a diaphragm control region encircling the diaphragm in a circumferentially hermetically sealed manner around the support region, the diaphragm control region applying a predetermined stress state to the support region; projecting from said support region into said chamber with a plate portion between said control region being deformed to position said control region relative to said support region for generation within said chamber; a diaphragm support plate; and a pre-calibrated pressure sensitive module for hermetically closing said chamber comprising a diaphragm support plate. (12) The module further includes a base member that is airtightly joined to the support area and firmly supports the same, the base member forming a casing abutment surface remote from the support area; 12. The control device according to claim 11, wherein the casing joint surface is hermetically joined to the casing.