JPS6116005B2 - - Google Patents
Info
- Publication number
- JPS6116005B2 JPS6116005B2 JP1767579A JP1767579A JPS6116005B2 JP S6116005 B2 JPS6116005 B2 JP S6116005B2 JP 1767579 A JP1767579 A JP 1767579A JP 1767579 A JP1767579 A JP 1767579A JP S6116005 B2 JPS6116005 B2 JP S6116005B2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- vibrator
- vibration
- detector
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
【発明の詳細な説明】
本発明は目盛尺を読み取つて長さを測定する装
置の改良である。DETAILED DESCRIPTION OF THE INVENTION The present invention is an improvement in a device for reading a scale and measuring length.
従来尺目盛を光学的に読み取るものは公知であ
るが、読み取り精度が低い欠点がある。 Conventionally, devices for optically reading scale scales are known, but they have the drawback of low reading accuracy.
本発明はこの読み取り精度を高めるために高周
波振動する振動子を用いて凹凸目盛を読むことを
特徴とする。即ち振動子を凹凸目盛尺に微小間隙
で対向し高周波で共振させておき、この振動する
振動子を凹凸目盛尺に沿つて平行移動させると、
凹凸部で反射波等の影響により振動子の共振周波
数が変化するから、振動子の周波数を検出判別し
ていることによつて容易に凹凸目盛を高精度をも
つて検出できるものである。 The present invention is characterized in that the uneven scale is read using a vibrator that vibrates at a high frequency in order to improve the reading accuracy. In other words, if a vibrator is opposed to a concave-convex scale with a minute gap and resonated at a high frequency, and this vibrating vibrator is moved in parallel along the concave-convex scale,
Since the resonant frequency of the vibrator changes due to the influence of reflected waves and the like on the uneven portion, the uneven scale can be easily detected with high precision by detecting and determining the frequency of the vibrator.
以下図面の一実施例により本発明を説明すれ
ば、１は目盛尺で、所定の間隔目盛で凹溝１ａの
目盛尺が形成してある。２は水晶，電歪，磁歪材
の振動子で、目盛尺１上に微小間隙で対向配置
し、計測時に対向間隙を一定に保つた状態で平行
移動する。３は振動子２を励振する高周波発信
器、４は振動変化を検出する検出器である。 The present invention will be described below with reference to an embodiment of the drawings. Reference numeral 1 denotes a scale scale, and the scale scale of the groove 1a is formed at predetermined interval scales. Reference numeral 2 denotes a vibrator made of crystal, electrostrictive, or magnetostrictive material, which is arranged opposite to each other on the scale 1 with a minute gap, and is moved in parallel while keeping the opposing gap constant during measurement. 3 is a high frequency oscillator that excites the vibrator 2, and 4 is a detector that detects vibration changes.
発振器３の発振周波数は1K〜1MHz程度の発振
をし、これにより振動子２を励起振動させて、図
示するように目盛尺１に微小間隙で対向する状態
で共振状態とする。即ち目盛尺と振動子との対向
間隔と振動子の励振周波数とを調整することによ
り振動子が共振状態になるように設定する。振動
子２の振動波は媒体空気を介して目盛尺１表面に
伝わり、反射振動が再び振動子２に作用する状態
で共振するが、振動子２が尺１に沿つて移動し、
凹溝１ａに対向すると反射波の伝播状態が変化し
振動子２の共振周波数に影響を与え変化せしめ
る。したがつてこの振動子２の振動数変化を検出
器４で検出判別することによつて目盛の位置判別
を高精度をもつて行なえる。即ち共振状態にある
振動子２からは極めて大きい振動エネルギが検出
されるが、対向位置が移動してその共振状態が凹
溝１ａ部分でくずれるため変化は極めて大きく高
感度をもつて検出できる。 The oscillation frequency of the oscillator 3 is about 1 K to 1 MHz, and this excites the vibrator 2 to vibrate, bringing it into a resonant state in a state where it faces the scale 1 with a small gap as shown in the figure. That is, by adjusting the facing interval between the scale scale and the vibrator and the excitation frequency of the vibrator, the vibrator is set to be in a resonant state. The vibration wave of the vibrator 2 is transmitted to the surface of the scale 1 through the air medium, and the reflected vibration acts on the vibrator 2 again, causing resonance, but as the vibrator 2 moves along the scale 1,
When facing the concave groove 1a, the propagation state of the reflected wave changes, affecting and changing the resonant frequency of the vibrator 2. Therefore, by detecting and determining the change in the frequency of the vibrator 2 with the detector 4, the position of the scale can be determined with high accuracy. That is, extremely large vibration energy is detected from the vibrator 2 in a resonant state, but since the opposing position moves and the resonant state is broken at the groove 1a, the change is extremely large and can be detected with high sensitivity.
なお検出器４による検出は反射波を検出判別す
るものであつてもよく、尺１の凹溝１ａと他の部
分とでは反射状態が異なるので容易に判別するこ
とができる。尺目盛は凸出目盛であつてもよい。
振動子２と目盛尺１間の伝播媒体には空気以外に
水，油等の液体を用いることができ、伝播効果を
高めて感度を向上させることができる。 Note that the detection by the detector 4 may be to detect and discriminate reflected waves, and since the reflection state is different between the groove 1a of the scale 1 and other parts, the discrimination can be easily made. The scale scale may be a convex scale.
In addition to air, a liquid such as water or oil can be used as the propagation medium between the vibrator 2 and the scale 1, thereby increasing the propagation effect and improving the sensitivity.
振動子２には前記実施例に説明した水晶の他
に、チタン酸バリウム磁器，ジルコンチタン酸鉛
系磁器等の圧電素子，電歪材が用いられ、また
AlFe系，Ni系の磁歪材の振動子を用いることが
できる。 In addition to the crystal described in the above embodiment, the vibrator 2 uses piezoelectric elements such as barium titanate porcelain, zirconate lead titanate porcelain, and electrostrictive materials.
A vibrator made of AlFe-based or Ni-based magnetostrictive material can be used.
図は本発明の一実施例構成図である。
１は目盛尺、１ａは凹溝目盛、２は振動子、３
は高周波発振器、４は検出器である。
The figure is a configuration diagram of an embodiment of the present invention. 1 is a scale scale, 1a is a groove scale, 2 is a vibrator, 3
is a high frequency oscillator, and 4 is a detector.
Claims (1)
間隙で対向し対向間隙を一定に維持した状態で対
向位置を目盛尺に沿つて平行移動する振動子と、
該振動子を振動する高周波発信器と、前記振動子
の振動変化を検出判別する検出器とを設け、前記
目盛尺と振動子との対向間隔と振動子の振動周波
数とを調整することにより、振動子が共振状態に
なるよう設定したことを特徴とする長さ測定装
置。1. A scale with a concave and convex scale, and a vibrator that faces the scale with a minute gap and moves the opposing position in parallel along the scale while keeping the opposing gap constant;
By providing a high frequency oscillator that vibrates the vibrator and a detector that detects and discriminates changes in vibration of the vibrator, and adjusting the facing distance between the scale scale and the vibrator and the vibration frequency of the vibrator, A length measuring device characterized in that a vibrator is set to be in a resonant state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1767579A JPS55109912A (en) | 1979-02-17 | 1979-02-17 | Length measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1767579A JPS55109912A (en) | 1979-02-17 | 1979-02-17 | Length measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55109912A JPS55109912A (en) | 1980-08-23 |
| JPS6116005B2 true JPS6116005B2 (en) | 1986-04-26 |
Family
ID=11950421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1767579A Granted JPS55109912A (en) | 1979-02-17 | 1979-02-17 | Length measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55109912A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH077505U (en) * | 1993-07-12 | 1995-02-03 | シュアラスター株式会社 | Anti-slip device for shoes |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5784411U (en) * | 1980-11-12 | 1982-05-25 | ||
| NO310386B1 (en) * | 1999-10-19 | 2001-06-25 | Frank Melandsoe | Apparatus for concealed coding of an object, and method for reading the codes |
-
1979
- 1979-02-17 JP JP1767579A patent/JPS55109912A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH077505U (en) * | 1993-07-12 | 1995-02-03 | シュアラスター株式会社 | Anti-slip device for shoes |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55109912A (en) | 1980-08-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3220258A (en) | Sensing the presence or absence of material | |
| US4126047A (en) | Surface acoustic wave rate sensor and position indicator | |
| CA1155197A (en) | Ultra sensitive liquid level detector and method | |
| US3943753A (en) | Solid state viscosimeter | |
| US6142948A (en) | Vibration displacement detecting system | |
| JPS6116005B2 (en) | ||
| JPH06221806A (en) | Touch signal probe | |
| US6269700B1 (en) | Contactless ultrasonic device for dimensional inspection | |
| US4811592A (en) | Specific gravity detector | |
| JPH04500273A (en) | Angular velocity detection sensor | |
| US2550528A (en) | Supersonic inspection | |
| CN115485535A (en) | Resonance sensor using MEMS resonator and detection method for resonance sensor | |
| JP2001304952A (en) | Ultrasonic sound pressure sensor | |
| JP2000329613A (en) | Oscillatory displacement detector | |
| SU439058A1 (en) | RECONSIBLE ULTRASONIC ULTRASONIC RADIATOR | |
| JPH0731169Y2 (en) | Ultrasonic probe | |
| JP2003050117A (en) | Method and apparatus for measuring thickness | |
| JPS5848045B2 (en) | Magnetic scale detection measurement device | |
| SU1043556A1 (en) | Piezo plate quality determination method | |
| RU2054623C1 (en) | Device for metering dimensions and linear motion | |
| SU699341A1 (en) | Ultrasonic level indicator | |
| JP3258433B2 (en) | Vibration detector | |
| SU717625A1 (en) | Vibration-type viscosity measuring transducer | |
| SU838549A1 (en) | Ultrasonic interferometer | |
| SU509824A1 (en) | Device for controlling the quality and composition of the medium at the speed of ultrasound |