JPS61159685U - - Google Patents
Info
- Publication number
- JPS61159685U JPS61159685U JP4313985U JP4313985U JPS61159685U JP S61159685 U JPS61159685 U JP S61159685U JP 4313985 U JP4313985 U JP 4313985U JP 4313985 U JP4313985 U JP 4313985U JP S61159685 U JPS61159685 U JP S61159685U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- pressurized chamber
- bimorph
- discharge valve
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4313985U JPS61159685U (ru) | 1985-03-27 | 1985-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4313985U JPS61159685U (ru) | 1985-03-27 | 1985-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61159685U true JPS61159685U (ru) | 1986-10-03 |
Family
ID=30554531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4313985U Pending JPS61159685U (ru) | 1985-03-27 | 1985-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61159685U (ru) |
-
1985
- 1985-03-27 JP JP4313985U patent/JPS61159685U/ja active Pending