JPS6115958B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in an electrolytic processing apparatus for performing electroplating processing such as electroforming and plating, or electrolytic corrosion processing such as electrolytic engraving and electrolytic polishing.

Nozzle electrodes are arranged opposite to the machined surface of the workpiece or the matrix, and electricity is applied while spraying and supplying electrolytic solution to cause electrolytic corrosion or electrodeposition, and the electrodes are moved to scan the machined surface of the workpiece or the matrix. A device which performs electrolytic corrosion and electrodeposition processing on the entire surface to be processed is conventionally known. According to such conventional devices, it is possible to easily process any shape by using a thin rod-shaped nozzle electrode, but the processed surface oxidizes and an oxide film is formed, and repeated pressurization can cause problems. If the electrolytic solution is blocked or the supplied electrolytic solution accumulates in a part that does not need to be processed or a part that has already been processed, the electrolytic current flows there and performs the process, which impairs the accuracy of the process.

The present invention has been proposed with the aim of eliminating the drawbacks of the conventional apparatus, and includes a closed tank equipped with an exhaust pump and an inert gas supply device, and a workpiece or mother plate in the tank. By providing a support device that tilts and supports the mold in a fixed manner, processing can be performed without the injected electrolyte flowing down and accumulating anywhere on the workpiece or the mother mold in an inert gas atmosphere inside the tank. It is characterized by the fact that it performs the following.

The present invention will be explained below with reference to embodiments of the drawings.

Figure 1 shows the workpiece (matrix) having the required shape.
This shows an example in which electrolytic corrosion (electrodeposition) is applied to the entire processed surface of a workpiece, in which 1 is a workpiece (matrix), which is tilted and fixed by a support device 2 so that the processed surface 1a faces sideways. Supported. Reference numeral 3 denotes a rod-shaped nozzle electrode disposed opposite to the processing surface 1a of the workpiece (matrix), and is fixed to the tip of the Z-axis 4 in the opposing direction, and the Z-axis 4 is connected to the X-axis 5 perpendicular to the opposing direction. and a head 6 that moves in the Y-axis (not shown) direction perpendicular to the plane of the paper. 7 is a Z-axis feed motor, 8 is an X-axis feed motor, and the Y-axis feed motor is not shown. A detection signal from a stylus 10 that moves the model 9 along the model 9 is applied to the Z-axis feed motor 7, and the electrode 3 is fed so as to face the machined surface 1a with a constant gap maintained at all times. Reference numeral 11 denotes an electrolyte supply pump, which supplies electrolyte to the electrode nozzle 3 through a connecting pipe 12. 13 is a processing power supply that supplies current between the electrode 3 and the workpiece (matrix) 1;
4 is a sealed tank that houses the workpiece (matrix) 1, and is equipped with an exhaust pump 15 and an inert gas supply device 16.
is provided.

Therefore, in order to prevent oxidation of the processed surface and perform stable processing, processing is performed in an atmosphere of an inert gas such as N ₂ , Ar, CO ₂ , etc. After evacuation, the tank 16 is opened and inert gas is supplied to fill the tank 14. In the inert gas atmosphere thus formed, the required electrolytic solution is injected and supplied from the nozzle electrode 3 toward the processing surface 1a, and electricity is applied from the processing power source 13 to cause electrolytic corrosion (electrodeposition). Perform processing.

At this time, the workpiece (matrix) 1 is tilted and fixed by the support device 2 so that the processing surface 1a is oriented sideways, so the electrolyte sprayed and supplied from the nozzle electrode 3 stays on the processing surface 1a. Flows down without accumulating. Therefore, the machining current flows intensively to the narrow portion of the machining surface 1a facing the nozzle electrode 3, thereby preventing or reducing current leakage to other portions. It is possible to prevent undesirable machining and perform highly accurate machining.

By moving the electrode 3 over the entire surface of the machining surface 1a using NC control or a copying control device and sequentially machining opposing narrow areas intensively, it is possible to perform highly accurate machining as a whole. Also, tank 1
By creating an inert gas atmosphere inside 4,
No oxidation of the surface of the processed surface 1a or oxidation of the electrodeposited layer occurs, and stable and highly accurate processing can be performed at high speed. Furthermore, if the electrolytic solution is sprayed and supplied to the processing section, there is a risk that the electrolytic solution will scatter around the processing equipment, but in the present invention, processing is performed in a closed tank, so there is a risk that the electrolytic solution will be sprayed and supplied. The work environment will not be contaminated.

Note that the pressure of the electrolytic solution injected from the nozzle is preferably at least 5 kg/cm ² or more in order to supply a sufficient amount of the electrolytic solution to the processing gap.

Figure 2 shows an example in which the workpiece (matrix) 1 is fixedly supported at a more acute angle than horizontally. In this case, only the narrow portion of the processing surface facing the electrode is processed more intensively, and unnecessary processing due to leakage current is prevented, which is highly effective in improving processing accuracy.

As described above, the present invention provides an apparatus for performing electroplating such as electroforming or electrolytic corrosion processing such as electrolytic etching engraving, in which a workpiece or a matrix is placed in a sealed tank filled with an inert gas. The supplied electrolyte is tilted and fixedly supported in a direction that prevents it from accumulating, and the electrolyte is sprayed and supplied to the facing gap between the machined surface and the rod-shaped electrode, and the rod-shaped electrode is held relative to the machined surface while maintaining a predetermined gap. By moving the material while processing, the formation of an oxide film that inhibits the progress of processing is prevented.
Since the machining surface is always maintained in an activated state, machining can be performed efficiently and at high speed.
By repeating the scanning movement of the rod-shaped electrode against the processing surface,
The process of stacking electrodeposited layers and the process of removing them by electrolytic corrosion can be easily performed at high speed.

Further, since the electrolytic solution does not accumulate on the machining surface or the like, unnecessary machining due to leakage current can be prevented and highly accurate machining can be performed. Therefore, according to the present invention, highly accurate machining can be performed at high speed, and since the machining is performed in a closed tank, the electrolyte that is sprayed and supplied is scattered around the machining equipment, causing damage to the work. It does not pollute the environment and is highly effective in terms of environmental conservation.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of one embodiment of the present invention, and FIG. 2 is a block diagram of another embodiment. DESCRIPTION OF SYMBOLS 1... Workpiece (matrix), 1a... Machining surface, 2... Support device, 3... Rod-shaped electrode, 4...
...Z-axis, 5...X-axis, 6...Head, 7,
8...Motor, 9...Model, 10...Stylus, 11...Pump, 12...Pipe, 13...Processing power supply, 14...Sealed tank, 15...Exhaust pump , 16...Inert gas supply device.

Claims (1)

[Claims] 1. In an electrolytic machining device in which rod-shaped electrodes are arranged opposite to the machining surface of a workpiece or a matrix with a small gap therebetween, and an electrolytic solution is sprayed and supplied to the gap site, and electricity is applied to perform electrolytic corrosion or electrodeposition machining. A closed tank equipped with an exhaust pump and an inert gas supply device is provided, and a support device is provided in the tank to fixedly support the workpiece or the mother mold while tilting it in a direction in which the electrolyte supplied by injection does not accumulate. An electrolytic processing apparatus comprising: a moving device for relatively moving the workpiece or master mold and the rod-shaped electrode while maintaining a predetermined gap therebetween.