JPS61159265A - スパッタリング用ターゲット板材を冷却板材にろう付けする方法 - Google Patents

スパッタリング用ターゲット板材を冷却板材にろう付けする方法

Info

Publication number
JPS61159265A
JPS61159265A JP25109384A JP25109384A JPS61159265A JP S61159265 A JPS61159265 A JP S61159265A JP 25109384 A JP25109384 A JP 25109384A JP 25109384 A JP25109384 A JP 25109384A JP S61159265 A JPS61159265 A JP S61159265A
Authority
JP
Japan
Prior art keywords
plate
members
shaped
pair
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25109384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373385B2 (enExample
Inventor
Hideaki Yoshida
秀昭 吉田
Masaki Morikawa
正樹 森川
Akira Mori
暁 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP25109384A priority Critical patent/JPS61159265A/ja
Publication of JPS61159265A publication Critical patent/JPS61159265A/ja
Publication of JPH0373385B2 publication Critical patent/JPH0373385B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP25109384A 1984-11-28 1984-11-28 スパッタリング用ターゲット板材を冷却板材にろう付けする方法 Granted JPS61159265A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25109384A JPS61159265A (ja) 1984-11-28 1984-11-28 スパッタリング用ターゲット板材を冷却板材にろう付けする方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25109384A JPS61159265A (ja) 1984-11-28 1984-11-28 スパッタリング用ターゲット板材を冷却板材にろう付けする方法

Publications (2)

Publication Number Publication Date
JPS61159265A true JPS61159265A (ja) 1986-07-18
JPH0373385B2 JPH0373385B2 (enExample) 1991-11-21

Family

ID=17217536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25109384A Granted JPS61159265A (ja) 1984-11-28 1984-11-28 スパッタリング用ターゲット板材を冷却板材にろう付けする方法

Country Status (1)

Country Link
JP (1) JPS61159265A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6471569A (en) * 1987-09-10 1989-03-16 Furukawa Electric Co Ltd Production of heat exchanger
JPH01301212A (ja) * 1988-02-16 1989-12-05 Asahi Denka Kogyo Kk 弾性成形型の製造方法並びにその弾性成形型を使用した成形品の製造方法
JP5451865B1 (ja) * 2012-11-29 2014-03-26 株式会社俄 宝飾品用半製品の製造方法、および、宝飾品の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350112U (enExample) * 1976-09-30 1978-04-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5350112U (enExample) * 1976-09-30 1978-04-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6471569A (en) * 1987-09-10 1989-03-16 Furukawa Electric Co Ltd Production of heat exchanger
JPH01301212A (ja) * 1988-02-16 1989-12-05 Asahi Denka Kogyo Kk 弾性成形型の製造方法並びにその弾性成形型を使用した成形品の製造方法
JP5451865B1 (ja) * 2012-11-29 2014-03-26 株式会社俄 宝飾品用半製品の製造方法、および、宝飾品の製造方法
WO2014084390A1 (ja) * 2012-11-29 2014-06-05 株式会社俄 宝飾品用半製品の製造方法、および、宝飾品の製造方法

Also Published As

Publication number Publication date
JPH0373385B2 (enExample) 1991-11-21

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