JPS6115670U - クリ−ンル−ム内の搬送設備 - Google Patents

クリ−ンル−ム内の搬送設備

Info

Publication number
JPS6115670U
JPS6115670U JP10024284U JP10024284U JPS6115670U JP S6115670 U JPS6115670 U JP S6115670U JP 10024284 U JP10024284 U JP 10024284U JP 10024284 U JP10024284 U JP 10024284U JP S6115670 U JPS6115670 U JP S6115670U
Authority
JP
Japan
Prior art keywords
groove
clean room
guided
guide rail
transport equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10024284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324445Y2 (enrdf_load_stackoverflow
Inventor
武秀 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP10024284U priority Critical patent/JPS6115670U/ja
Publication of JPS6115670U publication Critical patent/JPS6115670U/ja
Application granted granted Critical
Publication of JPH0324445Y2 publication Critical patent/JPH0324445Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Current-Collector Devices For Electrically Propelled Vehicles (AREA)
JP10024284U 1984-07-02 1984-07-02 クリ−ンル−ム内の搬送設備 Granted JPS6115670U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10024284U JPS6115670U (ja) 1984-07-02 1984-07-02 クリ−ンル−ム内の搬送設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10024284U JPS6115670U (ja) 1984-07-02 1984-07-02 クリ−ンル−ム内の搬送設備

Publications (2)

Publication Number Publication Date
JPS6115670U true JPS6115670U (ja) 1986-01-29
JPH0324445Y2 JPH0324445Y2 (enrdf_load_stackoverflow) 1991-05-28

Family

ID=30659708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10024284U Granted JPS6115670U (ja) 1984-07-02 1984-07-02 クリ−ンル−ム内の搬送設備

Country Status (1)

Country Link
JP (1) JPS6115670U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0324445Y2 (enrdf_load_stackoverflow) 1991-05-28

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