JPS61155829A - 圧力計 - Google Patents
圧力計Info
- Publication number
- JPS61155829A JPS61155829A JP27558084A JP27558084A JPS61155829A JP S61155829 A JPS61155829 A JP S61155829A JP 27558084 A JP27558084 A JP 27558084A JP 27558084 A JP27558084 A JP 27558084A JP S61155829 A JPS61155829 A JP S61155829A
- Authority
- JP
- Japan
- Prior art keywords
- strain
- substrate
- region
- gauge
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 239000000463 material Substances 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims abstract description 6
- 238000003466 welding Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
- G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27558084A JPS61155829A (ja) | 1984-12-28 | 1984-12-28 | 圧力計 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27558084A JPS61155829A (ja) | 1984-12-28 | 1984-12-28 | 圧力計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61155829A true JPS61155829A (ja) | 1986-07-15 |
| JPH0445058B2 JPH0445058B2 (enrdf_load_stackoverflow) | 1992-07-23 |
Family
ID=17557434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27558084A Granted JPS61155829A (ja) | 1984-12-28 | 1984-12-28 | 圧力計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61155829A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019195186A1 (en) | 2018-04-02 | 2019-10-10 | Magic Leap, Inc. | Hybrid polymer waveguide and methods for making the same |
-
1984
- 1984-12-28 JP JP27558084A patent/JPS61155829A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0445058B2 (enrdf_load_stackoverflow) | 1992-07-23 |
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