JPS61154239U - - Google Patents
Info
- Publication number
- JPS61154239U JPS61154239U JP3604785U JP3604785U JPS61154239U JP S61154239 U JPS61154239 U JP S61154239U JP 3604785 U JP3604785 U JP 3604785U JP 3604785 U JP3604785 U JP 3604785U JP S61154239 U JPS61154239 U JP S61154239U
- Authority
- JP
- Japan
- Prior art keywords
- attached
- link mechanism
- drive device
- transport device
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Description
第１図は、本考案の平面図、第２図はその側面
断面図を示す。
１，１′……リンク、２，２′……リンク、３
，３′……リンク、４……ウエハ受皿、５……モ
ータ、６，６′……ギヤー、７，７′……ギヤー
、８……ウエハ、９，１０……軸受。
FIG. 1 shows a plan view of the present invention, and FIG. 2 shows a side sectional view thereof. 1, 1'...Link, 2, 2'...Link, 3
, 3'... link, 4... wafer tray, 5... motor, 6, 6'... gear, 7, 7'... gear, 8... wafer, 9, 10... bearing.
Claims (1)
動装置を取付け、該駆動装置により他端が直線状
に移動するリンク機構を設け、該リンク機構の他
端に試料用受皿を取付けたことを特徴とする試料
搬送装置。 A transport device for semiconductor manufacturing equipment, characterized in that a drive device is attached to one end, a link mechanism is provided in which the other end moves linearly by the drive device, and a sample tray is attached to the other end of the link mechanism. Sample transport device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604785U JPS61154239U (en) | 1985-03-15 | 1985-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3604785U JPS61154239U (en) | 1985-03-15 | 1985-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61154239U true JPS61154239U (en) | 1986-09-25 |
Family
ID=30540881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3604785U Pending JPS61154239U (en) | 1985-03-15 | 1985-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61154239U (en) |
-
1985
- 1985-03-15 JP JP3604785U patent/JPS61154239U/ja active Pending