JPS61153529A - 半導体振動検出装置 - Google Patents

半導体振動検出装置

Info

Publication number
JPS61153529A
JPS61153529A JP27369584A JP27369584A JPS61153529A JP S61153529 A JPS61153529 A JP S61153529A JP 27369584 A JP27369584 A JP 27369584A JP 27369584 A JP27369584 A JP 27369584A JP S61153529 A JPS61153529 A JP S61153529A
Authority
JP
Japan
Prior art keywords
cantilever beam
polycrystalline silicon
resistance
resistance region
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27369584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0313534B2 (enExample
Inventor
Hideo Muro
室　英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP27369584A priority Critical patent/JPS61153529A/ja
Publication of JPS61153529A publication Critical patent/JPS61153529A/ja
Publication of JPH0313534B2 publication Critical patent/JPH0313534B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP27369584A 1984-12-27 1984-12-27 半導体振動検出装置 Granted JPS61153529A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27369584A JPS61153529A (ja) 1984-12-27 1984-12-27 半導体振動検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27369584A JPS61153529A (ja) 1984-12-27 1984-12-27 半導体振動検出装置

Publications (2)

Publication Number Publication Date
JPS61153529A true JPS61153529A (ja) 1986-07-12
JPH0313534B2 JPH0313534B2 (enExample) 1991-02-22

Family

ID=17531261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27369584A Granted JPS61153529A (ja) 1984-12-27 1984-12-27 半導体振動検出装置

Country Status (1)

Country Link
JP (1) JPS61153529A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017117700A1 (zh) * 2016-01-04 2017-07-13 南京大学 一种基于纳米粒子点阵量子输运特性的振动传感器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017117700A1 (zh) * 2016-01-04 2017-07-13 南京大学 一种基于纳米粒子点阵量子输运特性的振动传感器

Also Published As

Publication number Publication date
JPH0313534B2 (enExample) 1991-02-22

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