JPS61153505A - 微小すきま測定装置 - Google Patents

微小すきま測定装置

Info

Publication number
JPS61153505A
JPS61153505A JP27397084A JP27397084A JPS61153505A JP S61153505 A JPS61153505 A JP S61153505A JP 27397084 A JP27397084 A JP 27397084A JP 27397084 A JP27397084 A JP 27397084A JP S61153505 A JPS61153505 A JP S61153505A
Authority
JP
Japan
Prior art keywords
light
optical flat
laser
reflected
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27397084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418764B2 (enrdf_load_stackoverflow
Inventor
Toshibumi Okubo
俊文 大久保
Junichi Kishigami
順一 岸上
Shigehisa Fukui
福井　茂寿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP27397084A priority Critical patent/JPS61153505A/ja
Publication of JPS61153505A publication Critical patent/JPS61153505A/ja
Publication of JPH0418764B2 publication Critical patent/JPH0418764B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP27397084A 1984-12-27 1984-12-27 微小すきま測定装置 Granted JPS61153505A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27397084A JPS61153505A (ja) 1984-12-27 1984-12-27 微小すきま測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27397084A JPS61153505A (ja) 1984-12-27 1984-12-27 微小すきま測定装置

Publications (2)

Publication Number Publication Date
JPS61153505A true JPS61153505A (ja) 1986-07-12
JPH0418764B2 JPH0418764B2 (enrdf_load_stackoverflow) 1992-03-27

Family

ID=17535112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27397084A Granted JPS61153505A (ja) 1984-12-27 1984-12-27 微小すきま測定装置

Country Status (1)

Country Link
JP (1) JPS61153505A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020112367A (ja) * 2019-01-08 2020-07-27 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． ウェハ検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59216003A (ja) * 1983-05-24 1984-12-06 Toyoda Mach Works Ltd 隙間量測定方法及び装置
JPS59225308A (ja) * 1983-06-06 1984-12-18 Hitachi Ltd 微小間隔測定装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59216003A (ja) * 1983-05-24 1984-12-06 Toyoda Mach Works Ltd 隙間量測定方法及び装置
JPS59225308A (ja) * 1983-06-06 1984-12-18 Hitachi Ltd 微小間隔測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020112367A (ja) * 2019-01-08 2020-07-27 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． ウェハ検査装置

Also Published As

Publication number Publication date
JPH0418764B2 (enrdf_load_stackoverflow) 1992-03-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term