JPS61153338U - - Google Patents
Info
- Publication number
- JPS61153338U JPS61153338U JP3636585U JP3636585U JPS61153338U JP S61153338 U JPS61153338 U JP S61153338U JP 3636585 U JP3636585 U JP 3636585U JP 3636585 U JP3636585 U JP 3636585U JP S61153338 U JPS61153338 U JP S61153338U
- Authority
- JP
- Japan
- Prior art keywords
- guide member
- molecular beam
- storage section
- electron beam
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 230000008016 vaporization Effects 0.000 claims description 2
- 238000009834 vaporization Methods 0.000 claims description 2
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3636585U JPS61153338U (cs) | 1985-03-14 | 1985-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3636585U JPS61153338U (cs) | 1985-03-14 | 1985-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61153338U true JPS61153338U (cs) | 1986-09-22 |
Family
ID=30541475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3636585U Pending JPS61153338U (cs) | 1985-03-14 | 1985-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61153338U (cs) |
-
1985
- 1985-03-14 JP JP3636585U patent/JPS61153338U/ja active Pending