JPH0330696U - - Google Patents
Info
- Publication number
- JPH0330696U JPH0330696U JP9198289U JP9198289U JPH0330696U JP H0330696 U JPH0330696 U JP H0330696U JP 9198289 U JP9198289 U JP 9198289U JP 9198289 U JP9198289 U JP 9198289U JP H0330696 U JPH0330696 U JP H0330696U
- Authority
- JP
- Japan
- Prior art keywords
- partition member
- base plate
- peripheral surface
- attached
- shielding container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 5
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9198289U JPH0330696U (cs) | 1989-08-04 | 1989-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9198289U JPH0330696U (cs) | 1989-08-04 | 1989-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330696U true JPH0330696U (cs) | 1991-03-26 |
Family
ID=31641435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9198289U Pending JPH0330696U (cs) | 1989-08-04 | 1989-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330696U (cs) |
-
1989
- 1989-08-04 JP JP9198289U patent/JPH0330696U/ja active Pending
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