JPS61153337U - - Google Patents

Info

Publication number
JPS61153337U
JPS61153337U JP3531785U JP3531785U JPS61153337U JP S61153337 U JPS61153337 U JP S61153337U JP 3531785 U JP3531785 U JP 3531785U JP 3531785 U JP3531785 U JP 3531785U JP S61153337 U JPS61153337 U JP S61153337U
Authority
JP
Japan
Prior art keywords
susceptor
reaction vessel
heating source
substrate
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3531785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445237Y2 (US08063081-20111122-C00044.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985035317U priority Critical patent/JPH0445237Y2/ja
Publication of JPS61153337U publication Critical patent/JPS61153337U/ja
Application granted granted Critical
Publication of JPH0445237Y2 publication Critical patent/JPH0445237Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985035317U 1985-03-14 1985-03-14 Expired JPH0445237Y2 (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985035317U JPH0445237Y2 (US08063081-20111122-C00044.png) 1985-03-14 1985-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985035317U JPH0445237Y2 (US08063081-20111122-C00044.png) 1985-03-14 1985-03-14

Publications (2)

Publication Number Publication Date
JPS61153337U true JPS61153337U (US08063081-20111122-C00044.png) 1986-09-22
JPH0445237Y2 JPH0445237Y2 (US08063081-20111122-C00044.png) 1992-10-23

Family

ID=30539482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985035317U Expired JPH0445237Y2 (US08063081-20111122-C00044.png) 1985-03-14 1985-03-14

Country Status (1)

Country Link
JP (1) JPH0445237Y2 (US08063081-20111122-C00044.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391084A (en) * 1977-01-20 1978-08-10 Gnii Pi Redkometa Method and apparatus for evaporating source matter to evaporation portion
JPS5637296A (en) * 1979-09-05 1981-04-10 Toshiba Ceramics Co Ltd Epitaxially growing apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391084A (en) * 1977-01-20 1978-08-10 Gnii Pi Redkometa Method and apparatus for evaporating source matter to evaporation portion
JPS5637296A (en) * 1979-09-05 1981-04-10 Toshiba Ceramics Co Ltd Epitaxially growing apparatus

Also Published As

Publication number Publication date
JPH0445237Y2 (US08063081-20111122-C00044.png) 1992-10-23

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