Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest CorpfiledCriticalAdvantest Corp
Priority to JP9884184UpriorityCriticalpatent/JPS6115223U/ja
Priority to US06/747,560prioritypatent/US4691831A/en
Priority to EP85107793Aprioritypatent/EP0166409B1/en
Priority to DE8585107793Tprioritypatent/DE3582752D1/de
Publication of JPS6115223UpublicationCriticalpatent/JPS6115223U/ja
Application grantedgrantedCritical
Publication of JPH045465Y2publicationCriticalpatent/JPH045465Y2/ja