JPS61152112A - Surface acoustic wave device - Google Patents

Surface acoustic wave device

Info

Publication number
JPS61152112A
JPS61152112A JP27305684A JP27305684A JPS61152112A JP S61152112 A JPS61152112 A JP S61152112A JP 27305684 A JP27305684 A JP 27305684A JP 27305684 A JP27305684 A JP 27305684A JP S61152112 A JPS61152112 A JP S61152112A
Authority
JP
Japan
Prior art keywords
cap
acoustic wave
surface acoustic
adhesive
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27305684A
Other languages
Japanese (ja)
Inventor
Satoshi Wakamori
若森 聰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP27305684A priority Critical patent/JPS61152112A/en
Publication of JPS61152112A publication Critical patent/JPS61152112A/en
Pending legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To make a device suitable to face-to-face loading with excellent moisture proof by sealing the joint of an surface acoustic wave element part comprising a hermetically sealed box-shape body and a plastic cap with an adhesive and folding each lead protruding to the exterior of the box-shape body to the cap head part. CONSTITUTION:An elastic surface wave chip 16 is fixed with an adhesive 17 on an insulating plastic substrate 12 equipped with the I/O lead 13 and a grounding lead 14. Each electrode pattern and the leads 13 and 14 on the chip are connected through a bonding wire 15 to form the elastic surface wave element part. A plastic cap 18 puts on the element part. The joint of the element part and the substrate 12 is sealed with the adhesive so as to provide a sufficient moisture proof, and the end of each lead is folded along the side of the cap. Thus the moisture proofing processing and bonding work can be freely applied to the joint from the outside, therefore sealing work can be easily carried out in preventing a minute space from remaining between a sealing adhesive 19 and each member.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は良好な耐湿性を有し、しかも面付は実装用にも
好適な、プラスチックパッケージに収納され九弾性表面
波装置K関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a surface acoustic wave device K housed in a plastic package, which has good moisture resistance and is suitable for mounting.

〔発明の背景〕[Background of the invention]

弾性表面波装置のパッケージでは、弾性表面波素子の性
質上、弾性表面波チップの表面が自由空間に而していな
ければならない。周辺を金属環状体で囲まれたガラスス
テムに植設したリードに弾性表面波チップを取付け、こ
れに金属製キャップをかぶせて前記金属環状体と金属製
キャップとの金属同士の接合部を気密封止したものは、
内部空間を外部からの湿気の浸入に対して保護する点で
は良好な特性を示すが、高価になってしまう。そのため
、半導体装置の場合と同様に、安価なプラスチックパッ
ケージを用いた装置の実現が望まれている。弾性表面波
装置と半導体装置の場合とで顕著に異なる点は、弾性表
面波装置ではチップ表面に接して必ず自由空間が存在し
なければならず、弾性表面波素子の表面に、弾性表面波
振動の妨げとなるような耐湿性の保護被覆などを形成さ
せることは避けなければならないことである。
In the package of a surface acoustic wave device, the surface of the surface acoustic wave chip must be in free space due to the nature of the surface acoustic wave element. A surface acoustic wave chip is attached to a lead implanted in a glass stem surrounded by a metal annular body, and a metal cap is placed over this to airtightly seal the metal-to-metal joint between the metal annular body and the metal cap. What stopped is
Although it exhibits good properties in terms of protecting the internal space from moisture intrusion from the outside, it is expensive. Therefore, as in the case of semiconductor devices, it is desired to realize a device using an inexpensive plastic package. The notable difference between surface acoustic wave devices and semiconductor devices is that in surface acoustic wave devices, there must always be free space in contact with the chip surface, and surface acoustic wave vibrations can occur on the surface of the surface acoustic wave element. The formation of moisture-resistant protective coatings or the like that would interfere with the process should be avoided.

プラスチック(樹脂)パッケージに格納された弾性表面
波装置の従来例としては、例えば特開昭57−1382
11号公報に開示されたものがある。これは1弾性表面
波チップを、第2図(a)K示すように、まず昇華性物
質たとえばナフタリン7の液中に浸してチップの周囲に
ナフタリン7の結晶を塊状に形成させ1次に第2図(b
)に示すように2液性熱硬化型のシリコンゴム8内に浸
漬して塊の表面にシリコンゴム8の膜を形成させ。
As a conventional example of a surface acoustic wave device housed in a plastic (resin) package, for example, Japanese Patent Application Laid-Open No. 57-1382
There is one disclosed in Publication No. 11. As shown in FIG. 2(a)K, a surface acoustic wave chip is first immersed in a solution of a sublimable substance such as naphthalene 7, and crystals of naphthalene 7 are formed around the chip in the form of a lump. Figure 2 (b
), a film of silicone rubber 8 is formed on the surface of the lump by immersing it in two-component thermosetting silicone rubber 8.

次いで、全体を加熱してシリコンゴム8の膜の硬化とナ
フタリン結晶の昇華とを同時に行って第2図(0)に示
すようにシリコンゴム8の膜とチップの間に空間9全形
成させ、さらに第2図(a)K示すようにエポキシ等の
樹脂10の液中に浸漬してシリコンゴム8の膜に重ねて
樹脂10の膜を形成させである。このパッケージ形成法
は金型等を用いないので弾性表面波チップの大きさなど
を変更した場合にも容易に対処でき、ま六内部空間はま
ずシリコンゴムのような弾性膜によって囲まれているた
め、衝撃等によシ弾性表面波チップがパッケージ内面に
接触しても摂動が阻害されないなど特徴を有するが、製
造過糧が複雑で量産にけ不向きという問題がある。
Next, the whole is heated to simultaneously harden the silicone rubber film 8 and sublimate the naphthalene crystals, thereby completely forming a space 9 between the silicone rubber film 8 and the chip as shown in FIG. 2(0). Furthermore, as shown in FIG. 2(a)K, a film of resin 10 is formed by immersing it in a liquid of resin 10 such as epoxy and superimposing it on the film of silicone rubber 8. This package formation method does not use a mold or the like, so it can be easily handled even if the size of the surface acoustic wave chip is changed. Although it has the characteristics that perturbation is not inhibited even if the surface acoustic wave chip contacts the inner surface of the package due to impact, etc., there is a problem that the manufacturing process is complicated and it is not suitable for mass production.

また図示けしないが、プラスチック製のステムに植設し
たリードに弾性表面波チップを取付け、その外111に
プラスチック製のキャップをかぶせ、ステムの周辺とキ
ャップの内面の間の間PJを接着剤で埋めて封止するこ
とも行われている。これは真空管の構造に似ているが、
真空管の場合はステムもパルプもガラス製で封止はバル
ブ外周から加熱して軟化、溶融しかけたガラス同士を融
着させて封止しておシ、封止機構については全く異なる
Although not shown in the figure, a surface acoustic wave chip is attached to a lead implanted in a plastic stem, a plastic cap is placed on the outside of the chip, and a PJ is glued between the periphery of the stem and the inner surface of the cap. Burying and sealing is also practiced. This is similar to the structure of a vacuum tube, but
In the case of vacuum tubes, both the stem and the pulp are made of glass, and the sealing is done by heating the bulb from the outer periphery to soften it and fuse the nearly melted glass together, but the sealing mechanism is completely different.

上記接着剤で間隙を埋める際K、微少な孔が残留し易く
、このような孔を伝って、外部から湿気が浸入し易いと
いう問題がある。
When filling the gap with the above-mentioned adhesive, there is a problem in that minute holes tend to remain, and moisture easily infiltrates from the outside through such holes.

〔発明の名称〕[Name of invention]

本発明の目的は、製造法が簡単なステム、キャップ接着
構造で、しかも耐湿信頼性が高く、かつ、必要に応じて
パッケージの面付は実装が可能となるようなプラスチッ
クパッケージを有する弾性表面波装置f:提供すること
にある。
The object of the present invention is to provide a surface acoustic wave surface acoustic wave having a stem and cap adhesive structure that is easy to manufacture, has high moisture resistance reliability, and has a plastic package that allows mounting of the package as required. Device f: To provide.

〔発明の概要〕[Summary of the invention]

上記目的を達成するために本発明においては、夫々の端
部が周辺外部に突出した入力用、出力用、及び接地用の
リードを表面に取付けた絶縁基板K、弾性表面波チップ
を接着剤によ勺固定し、チップ上の各電極バサーンと絶
縁基板上の各リード端部とをワイヤボンディングして弾
性表面波素子部を形成させ、この素子部の絶縁基板周辺
に絶縁物製箱状キャップの開口部周辺を接合させて、弾
性表面波チップの上に自由空間を残して密閉箱状体を形
成させ、この密閉箱状体をなす素子部とキャップの接合
個所を接着剤で封止し、かつ、この密閉箱状体の外部に
突出した前記各リードをキャップ側面に沿ってキャップ
頭部の方へ折り曲げた0この場合、絶縁基板や絶縁物製
キャップは実際にけ絶縁性プラスチック製である。
In order to achieve the above object, the present invention uses an insulating substrate K having input, output, and grounding leads attached to its surface whose ends protrude outside the periphery, and a surface acoustic wave chip attached to an adhesive. A surface acoustic wave element is formed by wire bonding each electrode base on the chip and each lead end on the insulating substrate, and an insulating box-shaped cap is placed around the insulating substrate of this element. The periphery of the opening is bonded to form a sealed box-like body leaving a free space above the surface acoustic wave chip, and the joint portion of the element part and the cap forming the sealed box-like body is sealed with an adhesive. In addition, each lead protruding to the outside of this sealed box-like body is bent along the side surface of the cap toward the head of the cap. In this case, the insulating substrate and the cap made of insulating material are actually made of insulating plastic. .

この構造の利点は、キャップと基板周辺の接合個所に外
部から自由に耐湿処理や接着作業が施工できることであ
って(この点が従来のステム、キャップ封止部の場合と
異なる)、その結果、接着剤を用いて接合個所の封止作
業を行って十分良好な耐湿性が得られるようになる。ま
九、リードの端部を箱状キャップの頭部外側面に沿って
折り曲げることによル、従来、要望がありながら実現困
難だっ九面付は実装に好適なパッケージが容易に得られ
る。
The advantage of this structure is that moisture-resistant treatment and adhesive work can be freely applied from the outside to the bonding points around the cap and the substrate (this point differs from the conventional stem and cap sealing parts), and as a result, Sufficient moisture resistance can be obtained by sealing the joints using an adhesive. Furthermore, by bending the ends of the leads along the outer surface of the head of the box-shaped cap, it is possible to easily obtain a package suitable for mounting with nine sides, which has been difficult to achieve in the past despite the request.

〔発明の実施例〕[Embodiments of the invention]

91図(a)は本発明に係る絶縁性プラスチックのキャ
ップ18t−示し、同図(b)は入出力用リード13及
び接地用リード14が取付けられた絶縁性プラスチック
の基板12に1弾性表面波チップ16を接着剤17で固
定し、チップ上の各電極パターンとリード15.14を
ボンディングワイヤ15によシ接続した弾性表面波素子
部を示す〇なお、20けキャップ位置決め用の突起であ
る。
91 (a) shows an insulating plastic cap 18t according to the present invention, and FIG. The surface acoustic wave element section is shown in which the chip 16 is fixed with an adhesive 17 and each electrode pattern on the chip and leads 15.14 are connected to the bonding wire 15. In addition, there are 20 protrusions for positioning the cap.

この弾性表面波素子部K、キャップ18をかぶせ。Cover this surface acoustic wave element part K with the cap 18.

キャップと弾性表面波素子部の基板12との接合部を接
着剤で、十分耐湿性を有するように封止し。
The joint between the cap and the substrate 12 of the surface acoustic wave element section is sealed with an adhesive so as to have sufficient moisture resistance.

更に各リードの端部をキャップの側面に沿って曲げると
、第4図(o)、(d)K側断面図を示すようなプラス
チックパッケージに収納された弾性表面波装置が得られ
る。これらの図中、19けキャップ1日と基板12との
接合個所を耐湿的に封止する接着剤で、その他の符号は
第4図(b)の場合と同様である。このようKすると、
前述の如く、接合個所に外部から自由に耐湿処理や接着
作業が出来る念めに、封止用接着剤19と各部材との間
に、湿気が浸入する経路とな石微少な隙間が残留しない
ように封止作業を行うことが容易に可能となる。接着剤
19による封止構造は、第4図(0)に示した程度でも
、十分な耐湿性が得られるが、(d)k示すように接着
剤19の塗布部位を広くすれば、湿気が浸入する隙間が
残留する確率が低下し、仮に長くつながった隙間が残留
してい念場合にも経路が非常に長いために湿気が浸入し
難しくなる。本発明の構造ならば、第4図(d)K示す
ようK、接着剤19を広く厚く塗布しても、弾性表面波
装置を外部回路に接続する際に何等邪魔にならない。キ
ャップ1Bの側面に、第4図(8)K示すようK、リー
ドかけ′!ルこむ程度の溝を設けておいてもよい。
Further, by bending the end of each lead along the side surface of the cap, a surface acoustic wave device housed in a plastic package as shown in FIGS. 4(o) and 4(d) K side sectional view is obtained. In these figures, an adhesive is used to moisture-proofly seal the joint between the cap 19 and the substrate 12, and other symbols are the same as those in FIG. 4(b). If you K like this,
As mentioned above, in order to be able to freely perform moisture-proofing treatment and bonding work on the joints from the outside, it is necessary to ensure that there are no small gaps remaining between the sealing adhesive 19 and each component, which can serve as a path for moisture to infiltrate. It becomes possible to easily perform the sealing work. The sealing structure using the adhesive 19 as shown in FIG. 4(0) can provide sufficient moisture resistance, but if the area where the adhesive 19 is applied is widened as shown in FIG. The probability that a gap for moisture will remain will decrease, and even if a long connected gap remains, the route will be very long, making it difficult for moisture to infiltrate. With the structure of the present invention, even if the adhesive 19 is widely and thickly applied as shown in FIG. 4(d), it will not interfere in any way when connecting the surface acoustic wave device to an external circuit. Attach the lead K to the side of the cap 1B as shown in Figure 4 (8) K! It is also possible to provide a groove that is large enough to fit through the hole.

また、第4図Ct)、(g)K示すように、キャップ1
Bの側面に沿って折り曲けたリードの端部を、更にキャ
ップ1Bの頭部外側面に沿って折り曲げ1面付は実装用
の端子を形成させることが出来る。この場合も、第4図
(f)K示すようK。
In addition, as shown in Fig. 4Ct) and (g)K, the cap 1
The end of the lead bent along the side surface of the cap 1B can be further bent along the outer surface of the head of the cap 1B to form a terminal for mounting. In this case as well, K as shown in FIG. 4(f).

端子がキャップの外側面から厚さだけ浮き出ているよう
Kしても、(g)K示すようにキャップの面に埋め込ん
でも良く、何れKするかけ、使用者側の要求による。
The terminal may protrude from the outer surface of the cap by a certain amount, or it may be buried in the surface of the cap as shown in (g), depending on the user's requirements.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明によれば、十分曳好な耐湿性
を有するステム、キャップ接合構造のプラスチックパッ
ケージに収納した弾性表面挟装!が得られ、更忙、容J
l、に、面付は実装に好適な端子構造にすることが出来
る。
As explained above, according to the present invention, a stem having sufficient moisture resistance and an elastic surface sandwiched in a plastic package having a cap joint structure! is obtained, Sarajyo, Yong J.
Second, surface mounting allows for a terminal structure suitable for mounting.

【図面の簡単な説明】[Brief explanation of the drawing]

第4図(a)は本発明に係るキャップを示す図。 同図(b)は本発明に係る弾性表面波素子部を示す図、
同図(c)、(d)は夫々異なる接合個所封止構造を有
する本発明実施例を示す図、同図(s)はキャップ側面
にリードかはまルこむ溝を設けた実施例の其の溝を示す
図、同図(r)、(g)は面付は実装に適した端子構造
を有する実施例を示す図、第2図(a)〜(d)は従来
のプラスチックパッケージを有する弾性表面波装置の説
明図である。 12・・−・・基板、13.14・・・・・・リード、
15・・・ボンディングワイヤ、16・・・・・・弾性
表面波チップ。 17・・・・・・接着剤、18・・・・・・キャップ、
19・・・・・・接合個所封止用接着剤、20・・・・
・・キャップ位置決め用突起。 オ /III flr5A (C’) (1>             (1)才 2 図
FIG. 4(a) is a diagram showing a cap according to the present invention. The same figure (b) is a figure showing a surface acoustic wave element part concerning the present invention,
Figures (c) and (d) show embodiments of the present invention having different joint sealing structures, and Figure (s) shows an embodiment in which a groove into which the lead fits is provided on the side surface of the cap. Figures (r) and (g) are diagrams showing an embodiment with a terminal structure suitable for surface mounting, and Figures 2 (a) to (d) are diagrams showing conventional plastic packages. FIG. 2 is an explanatory diagram of a surface acoustic wave device. 12... Board, 13.14... Lead,
15... Bonding wire, 16... Surface acoustic wave chip. 17...adhesive, 18...cap,
19... Adhesive for sealing joints, 20...
・Protrusion for positioning the cap. O /III flr5A (C') (1> (1) years old 2 Fig.

Claims (1)

【特許請求の範囲】 1)圧電性基板の表面に入力および出力くし形電極を形
成させた弾性表面波チップを、それぞれ端部が周辺外部
に突出した入力用、出力用、及び接地用のリードを表面
に取付けた絶縁基板に、接着剤により固定し、チップ上
の各電極パターンと絶縁基板上の各リード端部とをワイ
ヤボンディングして弾性表面波素子部を形成させ、この
素子部の絶縁基板周辺に絶縁物製箱状キャップの開口部
周辺を接合させて、弾性表面波チップの上に自由空間を
残して密閉箱状体を形成させ、この密閉箱状体をなす素
子部とキャップの接合個所を接着剤で封止し、かつ、こ
の密閉箱状体の外部に突出した前記各リードをキャップ
側面に沿ってキャップ頭部の方へ折り曲げたことを特徴
とする弾性表面波装置。 2)キャップ側面に沿って折り曲げたリードの端部を更
にキャップ頭部外側面に沿って折り曲げ、面付け実装用
端子を形成させた特許請求の範囲第4項記載の弾性表面
波装置。
[Claims] 1) A surface acoustic wave chip having input and output comb-shaped electrodes formed on the surface of a piezoelectric substrate is connected to input, output, and grounding leads whose ends protrude outside the periphery. is fixed with adhesive to an insulating substrate attached to the surface, and each electrode pattern on the chip and each lead end on the insulating substrate are wire bonded to form a surface acoustic wave element, and the insulation of this element is The periphery of the opening of an insulating box-shaped cap is bonded to the periphery of the substrate, leaving a free space above the surface acoustic wave chip to form a sealed box-shaped body. 1. A surface acoustic wave device characterized in that the joint portion is sealed with an adhesive, and each of the leads protruding to the outside of the sealed box-like body is bent along the side surface of the cap toward the head of the cap. 2) The surface acoustic wave device according to claim 4, wherein the end portion of the lead bent along the side surface of the cap is further bent along the outer surface of the cap head to form a terminal for surface mounting.
JP27305684A 1984-12-26 1984-12-26 Surface acoustic wave device Pending JPS61152112A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27305684A JPS61152112A (en) 1984-12-26 1984-12-26 Surface acoustic wave device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27305684A JPS61152112A (en) 1984-12-26 1984-12-26 Surface acoustic wave device

Publications (1)

Publication Number Publication Date
JPS61152112A true JPS61152112A (en) 1986-07-10

Family

ID=17522534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27305684A Pending JPS61152112A (en) 1984-12-26 1984-12-26 Surface acoustic wave device

Country Status (1)

Country Link
JP (1) JPS61152112A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2660499A1 (en) * 1990-03-27 1991-10-04 Electronique Piezo Elect Cie THERMOSTATE PILOT WITH PIEZOELECTRIC RESONATOR, LITTLE SENSITIVE TO CLIMATE CHANGE.
EP0736972A1 (en) * 1995-04-03 1996-10-09 Motorola, Inc. Plastic encapsulated saw device and method
US6446316B1 (en) * 1994-05-02 2002-09-10 Siemens Matsushita Components Gmbh & Co. Kg Method for producing an encapsulation for a SAW component operating with surface acoustic waves

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2660499A1 (en) * 1990-03-27 1991-10-04 Electronique Piezo Elect Cie THERMOSTATE PILOT WITH PIEZOELECTRIC RESONATOR, LITTLE SENSITIVE TO CLIMATE CHANGE.
US6446316B1 (en) * 1994-05-02 2002-09-10 Siemens Matsushita Components Gmbh & Co. Kg Method for producing an encapsulation for a SAW component operating with surface acoustic waves
EP0736972A1 (en) * 1995-04-03 1996-10-09 Motorola, Inc. Plastic encapsulated saw device and method

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