JPS6115154B2 - - Google Patents

Info

Publication number
JPS6115154B2
JPS6115154B2 JP13610878A JP13610878A JPS6115154B2 JP S6115154 B2 JPS6115154 B2 JP S6115154B2 JP 13610878 A JP13610878 A JP 13610878A JP 13610878 A JP13610878 A JP 13610878A JP S6115154 B2 JPS6115154 B2 JP S6115154B2
Authority
JP
Japan
Prior art keywords
film
silicate
tin oxide
oxide film
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13610878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5562166A (en
Inventor
Hideo Kawamura
Seishiro Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP13610878A priority Critical patent/JPS5562166A/ja
Publication of JPS5562166A publication Critical patent/JPS5562166A/ja
Publication of JPS6115154B2 publication Critical patent/JPS6115154B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP13610878A 1978-11-04 1978-11-04 Metal product having protective coating and manufacture thereof Granted JPS5562166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13610878A JPS5562166A (en) 1978-11-04 1978-11-04 Metal product having protective coating and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13610878A JPS5562166A (en) 1978-11-04 1978-11-04 Metal product having protective coating and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5562166A JPS5562166A (en) 1980-05-10
JPS6115154B2 true JPS6115154B2 (enrdf_load_stackoverflow) 1986-04-22

Family

ID=15167465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13610878A Granted JPS5562166A (en) 1978-11-04 1978-11-04 Metal product having protective coating and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5562166A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4835439A (en) * 1987-09-29 1989-05-30 General Electric Company Increasing the oxidation resistance of molybdenum and its use for lamp seals
JP2594113B2 (ja) * 1988-05-31 1997-03-26 三洋電機株式会社 酸化錫膜の形成方法
TWI471388B (zh) * 2014-05-09 2015-02-01 Hongtansawat Warapon Inorganic microfilm substrate and its manufacturing method
JP6749181B2 (ja) 2016-08-19 2020-09-02 Ntn株式会社 電動モータ装置

Also Published As

Publication number Publication date
JPS5562166A (en) 1980-05-10

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