JPS61151352U - - Google Patents
Info
- Publication number
- JPS61151352U JPS61151352U JP3515485U JP3515485U JPS61151352U JP S61151352 U JPS61151352 U JP S61151352U JP 3515485 U JP3515485 U JP 3515485U JP 3515485 U JP3515485 U JP 3515485U JP S61151352 U JPS61151352 U JP S61151352U
- Authority
- JP
- Japan
- Prior art keywords
- sensitive part
- semiconductor
- machining
- thickness
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3515485U JPS61151352U (pl) | 1985-03-12 | 1985-03-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3515485U JPS61151352U (pl) | 1985-03-12 | 1985-03-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61151352U true JPS61151352U (pl) | 1986-09-18 |
Family
ID=30539174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3515485U Pending JPS61151352U (pl) | 1985-03-12 | 1985-03-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61151352U (pl) |
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1985
- 1985-03-12 JP JP3515485U patent/JPS61151352U/ja active Pending