JPS61151335U - - Google Patents

Info

Publication number
JPS61151335U
JPS61151335U JP3337185U JP3337185U JPS61151335U JP S61151335 U JPS61151335 U JP S61151335U JP 3337185 U JP3337185 U JP 3337185U JP 3337185 U JP3337185 U JP 3337185U JP S61151335 U JPS61151335 U JP S61151335U
Authority
JP
Japan
Prior art keywords
utility
model registration
steam
steam drying
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3337185U
Other languages
Japanese (ja)
Other versions
JPH058676Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985033371U priority Critical patent/JPH058676Y2/ja
Publication of JPS61151335U publication Critical patent/JPS61151335U/ja
Application granted granted Critical
Publication of JPH058676Y2 publication Critical patent/JPH058676Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の蒸気乾燥装置の一実施例を
示す断面図、第２図は従来の装置の断面図である
。 ２……溶剤、４……半導体ウエハ、７……フイ
ルタ。 FIG. 1 is a sectional view showing an embodiment of the steam drying apparatus of this invention, and FIG. 2 is a sectional view of a conventional apparatus. 2...Solvent, 4...Semiconductor wafer, 7...Filter.

Claims (1)

【実用新案登録請求の範囲】 (1) 被乾燥物に溶剤の蒸気を接触させて被乾燥
物を乾燥させる蒸気乾燥装置において、被乾燥物
と蒸気の基材である溶剤液面との間に、蒸気のみ
を通過させるフイルタを設けたことを特徴とする
蒸気乾燥装置。 (2) フイルタはフツ素樹脂メツシユ材からなる
ことを特徴とする実用新案登録請求の範囲第(1)
項記載の蒸気乾燥装置。 (3) フツ素樹脂メツシユ材は目の粗さが０．５m
m程度であることを特徴とする実用新案登録請求
の範囲第(2)項記載の蒸気乾燥装置。[Claims for Utility Model Registration] (1) In a steam drying device that dries an object to be dried by bringing solvent vapor into contact with the object, there is a A steam drying device characterized by being provided with a filter that allows only steam to pass through. (2) Utility model registration claim No. (1) characterized in that the filter is made of fluororesin mesh material
Steam drying equipment as described in Section 1. (3) Fluorine resin mesh material has a mesh roughness of 0.5m.
The steam drying apparatus according to claim (2) of the utility model registration claim, characterized in that the drying temperature is about m.
JP1985033371U 1985-03-11 1985-03-11 Expired - Lifetime JPH058676Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985033371U JPH058676Y2 (en) 1985-03-11 1985-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985033371U JPH058676Y2 (en) 1985-03-11 1985-03-11

Publications (2)

Publication Number Publication Date
JPS61151335U true JPS61151335U (en) 1986-09-18
JPH058676Y2 JPH058676Y2 (en) 1993-03-04

Family

ID=30535761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985033371U Expired - Lifetime JPH058676Y2 (en) 1985-03-11 1985-03-11

Country Status (1)

Country Link
JP (1) JPH058676Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161623A (en) * 1986-12-25 1988-07-05 Tokuyama Soda Co Ltd Drying method
JPS63105329U (en) * 1986-12-25 1988-07-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6123324A (en) * 1984-07-11 1986-01-31 Hitachi Ltd Drying apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6123324A (en) * 1984-07-11 1986-01-31 Hitachi Ltd Drying apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161623A (en) * 1986-12-25 1988-07-05 Tokuyama Soda Co Ltd Drying method
JPS63105329U (en) * 1986-12-25 1988-07-08

Also Published As

Publication number Publication date
JPH058676Y2 (en) 1993-03-04

Similar Documents

Publication Publication Date Title
SE7902816L (en) FILTER
IT7867820A0 (en) PROCEDURE AND SYSTEM FOR DRYING SOLID WOOD IN BOARDS OR SEMI-PROCESSED WITH THE SUPERHEATED STEAM SYSTEM
JPS61151335U (en)
FI870358A (en) ANORDNING FOER TORKNING AV FUKTIG LUFT.
JPH0480052U (en)
JPS5820898U (en) drying equipment
JPS5248155A (en) Dehumidifying/drying method and apparatus for same
JPS6355090U (en)
JPS5232165A (en) Dehydrating and drying method of wet dust and device therefore
JPH0446541U (en)
USD248660S (en) Photographic print drying apparatus
JPS62120344U (en)
JPS62152437U (en)
JPS53107396A (en) Electrophoresis box
JPH01131492U (en)
JPS5244463A (en) Filter
JPS63201997U (en)
JPS5330072A (en) Filter cylinder for vacuum dehydrator
JPS6448117U (en)
JPH0396036U (en)
JPS6480845A (en) Catalyst carrying method for oxygen sensor
JPH0480042U (en)
JPH0426017U (en)
JPS5217691A (en) Manufacturing process of power cable junction part
JPS51111490A (en) Manufacturing of absorbent