JPS61151332U - - Google Patents

Info

Publication number
JPS61151332U
JPS61151332U JP3524385U JP3524385U JPS61151332U JP S61151332 U JPS61151332 U JP S61151332U JP 3524385 U JP3524385 U JP 3524385U JP 3524385 U JP3524385 U JP 3524385U JP S61151332 U JPS61151332 U JP S61151332U
Authority
JP
Japan
Prior art keywords
sample
cassette
fulcrum
needle
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3524385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3524385U priority Critical patent/JPS61151332U/ja
Publication of JPS61151332U publication Critical patent/JPS61151332U/ja
Pending legal-status Critical Current

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  • Electron Beam Exposure (AREA)
JP3524385U 1985-03-12 1985-03-12 Pending JPS61151332U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3524385U JPS61151332U (enrdf_load_stackoverflow) 1985-03-12 1985-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3524385U JPS61151332U (enrdf_load_stackoverflow) 1985-03-12 1985-03-12

Publications (1)

Publication Number Publication Date
JPS61151332U true JPS61151332U (enrdf_load_stackoverflow) 1986-09-18

Family

ID=30539346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3524385U Pending JPS61151332U (enrdf_load_stackoverflow) 1985-03-12 1985-03-12

Country Status (1)

Country Link
JP (1) JPS61151332U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7078655B1 (en) * 1999-08-12 2006-07-18 Ibiden Co., Ltd. Ceramic substrate, ceramic heater, electrostatic chuck and wafer prober for use in semiconductor producing and inspecting devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7078655B1 (en) * 1999-08-12 2006-07-18 Ibiden Co., Ltd. Ceramic substrate, ceramic heater, electrostatic chuck and wafer prober for use in semiconductor producing and inspecting devices

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