JPS61150327A - 可変成形ビ−ム制御方法 - Google Patents

可変成形ビ−ム制御方法

Info

Publication number
JPS61150327A
JPS61150327A JP59271805A JP27180584A JPS61150327A JP S61150327 A JPS61150327 A JP S61150327A JP 59271805 A JP59271805 A JP 59271805A JP 27180584 A JP27180584 A JP 27180584A JP S61150327 A JPS61150327 A JP S61150327A
Authority
JP
Japan
Prior art keywords
data
aperture
origin
deflection
shaping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59271805A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435896B2 (enExample
Inventor
Kanji Wada
和田　寛次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59271805A priority Critical patent/JPS61150327A/ja
Publication of JPS61150327A publication Critical patent/JPS61150327A/ja
Publication of JPH0435896B2 publication Critical patent/JPH0435896B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Electron Beam Exposure (AREA)
JP59271805A 1984-12-25 1984-12-25 可変成形ビ−ム制御方法 Granted JPS61150327A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59271805A JPS61150327A (ja) 1984-12-25 1984-12-25 可変成形ビ−ム制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59271805A JPS61150327A (ja) 1984-12-25 1984-12-25 可変成形ビ−ム制御方法

Publications (2)

Publication Number Publication Date
JPS61150327A true JPS61150327A (ja) 1986-07-09
JPH0435896B2 JPH0435896B2 (enExample) 1992-06-12

Family

ID=17505093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59271805A Granted JPS61150327A (ja) 1984-12-25 1984-12-25 可変成形ビ−ム制御方法

Country Status (1)

Country Link
JP (1) JPS61150327A (enExample)

Also Published As

Publication number Publication date
JPH0435896B2 (enExample) 1992-06-12

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Legal Events

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