JPS61149812A - 振動する物体の表面検査装置 - Google Patents

振動する物体の表面検査装置

Info

Publication number
JPS61149812A
JPS61149812A JP59276033A JP27603384A JPS61149812A JP S61149812 A JPS61149812 A JP S61149812A JP 59276033 A JP59276033 A JP 59276033A JP 27603384 A JP27603384 A JP 27603384A JP S61149812 A JPS61149812 A JP S61149812A
Authority
JP
Japan
Prior art keywords
light
reflected light
receiving element
area
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59276033A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0476404B2 (enExample
Inventor
Mitsuhito Kamei
光仁 亀井
Mikio Tachibana
橘　幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59276033A priority Critical patent/JPS61149812A/ja
Publication of JPS61149812A publication Critical patent/JPS61149812A/ja
Publication of JPH0476404B2 publication Critical patent/JPH0476404B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Head (AREA)
JP59276033A 1984-12-24 1984-12-24 振動する物体の表面検査装置 Granted JPS61149812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59276033A JPS61149812A (ja) 1984-12-24 1984-12-24 振動する物体の表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59276033A JPS61149812A (ja) 1984-12-24 1984-12-24 振動する物体の表面検査装置

Publications (2)

Publication Number Publication Date
JPS61149812A true JPS61149812A (ja) 1986-07-08
JPH0476404B2 JPH0476404B2 (enExample) 1992-12-03

Family

ID=17563849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59276033A Granted JPS61149812A (ja) 1984-12-24 1984-12-24 振動する物体の表面検査装置

Country Status (1)

Country Link
JP (1) JPS61149812A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH048332U (enExample) * 1990-05-09 1992-01-24
JP2017519971A (ja) * 2014-04-22 2017-07-20 ケーエルエー−テンカー コーポレイション 共焦点ライン検査光学システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112304A (en) * 1976-03-17 1977-09-20 Victor Co Of Japan Ltd Contactless pick-up
JPS53138781A (en) * 1977-05-10 1978-12-04 Mitsubishi Electric Corp Surface test device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52112304A (en) * 1976-03-17 1977-09-20 Victor Co Of Japan Ltd Contactless pick-up
JPS53138781A (en) * 1977-05-10 1978-12-04 Mitsubishi Electric Corp Surface test device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH048332U (enExample) * 1990-05-09 1992-01-24
JP2017519971A (ja) * 2014-04-22 2017-07-20 ケーエルエー−テンカー コーポレイション 共焦点ライン検査光学システム
JP2021067697A (ja) * 2014-04-22 2021-04-30 ケーエルエー コーポレイション ウエハ検査システム及び装置
JP2022183309A (ja) * 2014-04-22 2022-12-08 ケーエルエー コーポレイション ウエハ検査システム及び装置

Also Published As

Publication number Publication date
JPH0476404B2 (enExample) 1992-12-03

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