JPS61149807U - - Google Patents

Info

Publication number
JPS61149807U
JPS61149807U JP3291585U JP3291585U JPS61149807U JP S61149807 U JPS61149807 U JP S61149807U JP 3291585 U JP3291585 U JP 3291585U JP 3291585 U JP3291585 U JP 3291585U JP S61149807 U JPS61149807 U JP S61149807U
Authority
JP
Japan
Prior art keywords
light
beam splitter
observed
utility
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3291585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3291585U priority Critical patent/JPS61149807U/ja
Publication of JPS61149807U publication Critical patent/JPS61149807U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP3291585U 1985-03-08 1985-03-08 Pending JPS61149807U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3291585U JPS61149807U (enExample) 1985-03-08 1985-03-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3291585U JPS61149807U (enExample) 1985-03-08 1985-03-08

Publications (1)

Publication Number Publication Date
JPS61149807U true JPS61149807U (enExample) 1986-09-16

Family

ID=30534874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3291585U Pending JPS61149807U (enExample) 1985-03-08 1985-03-08

Country Status (1)

Country Link
JP (1) JPS61149807U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001077652A1 (en) * 2000-04-10 2001-10-18 Ccs Co., Ltd. Surface inspection device
JP2005257521A (ja) * 2004-03-12 2005-09-22 Mitsutoyo Corp 光学式変位測定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5430061A (en) * 1977-08-10 1979-03-06 Hitachi Ltd Illuminating device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5430061A (en) * 1977-08-10 1979-03-06 Hitachi Ltd Illuminating device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001077652A1 (en) * 2000-04-10 2001-10-18 Ccs Co., Ltd. Surface inspection device
KR100635989B1 (ko) * 2000-04-10 2006-10-18 씨씨에스 가부시키가이샤 표면검사장치
JP2005257521A (ja) * 2004-03-12 2005-09-22 Mitsutoyo Corp 光学式変位測定装置

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