JPS61149266U - - Google Patents
Info
- Publication number
- JPS61149266U JPS61149266U JP3361885U JP3361885U JPS61149266U JP S61149266 U JPS61149266 U JP S61149266U JP 3361885 U JP3361885 U JP 3361885U JP 3361885 U JP3361885 U JP 3361885U JP S61149266 U JPS61149266 U JP S61149266U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electrode
- charged particle
- particle source
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims 4
- 239000000284 extract Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361885U JPS61149266U (enExample) | 1985-03-08 | 1985-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3361885U JPS61149266U (enExample) | 1985-03-08 | 1985-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61149266U true JPS61149266U (enExample) | 1986-09-13 |
Family
ID=30536237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3361885U Pending JPS61149266U (enExample) | 1985-03-08 | 1985-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149266U (enExample) |
-
1985
- 1985-03-08 JP JP3361885U patent/JPS61149266U/ja active Pending