JPS61146949U - - Google Patents
Info
- Publication number
- JPS61146949U JPS61146949U JP3071685U JP3071685U JPS61146949U JP S61146949 U JPS61146949 U JP S61146949U JP 3071685 U JP3071685 U JP 3071685U JP 3071685 U JP3071685 U JP 3071685U JP S61146949 U JPS61146949 U JP S61146949U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- identification codes
- wafer transfer
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3071685U JPS61146949U (enExample) | 1985-03-04 | 1985-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3071685U JPS61146949U (enExample) | 1985-03-04 | 1985-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61146949U true JPS61146949U (enExample) | 1986-09-10 |
Family
ID=30530661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3071685U Pending JPS61146949U (enExample) | 1985-03-04 | 1985-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61146949U (enExample) |
-
1985
- 1985-03-04 JP JP3071685U patent/JPS61146949U/ja active Pending
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