JPS61146949U - - Google Patents

Info

Publication number
JPS61146949U
JPS61146949U JP3071685U JP3071685U JPS61146949U JP S61146949 U JPS61146949 U JP S61146949U JP 3071685 U JP3071685 U JP 3071685U JP 3071685 U JP3071685 U JP 3071685U JP S61146949 U JPS61146949 U JP S61146949U
Authority
JP
Japan
Prior art keywords
wafer
transfer device
identification codes
wafer transfer
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3071685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3071685U priority Critical patent/JPS61146949U/ja
Publication of JPS61146949U publication Critical patent/JPS61146949U/ja
Pending legal-status Critical Current

Links

JP3071685U 1985-03-04 1985-03-04 Pending JPS61146949U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3071685U JPS61146949U (enExample) 1985-03-04 1985-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3071685U JPS61146949U (enExample) 1985-03-04 1985-03-04

Publications (1)

Publication Number Publication Date
JPS61146949U true JPS61146949U (enExample) 1986-09-10

Family

ID=30530661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3071685U Pending JPS61146949U (enExample) 1985-03-04 1985-03-04

Country Status (1)

Country Link
JP (1) JPS61146949U (enExample)

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