JPS61146944U - - Google Patents
Info
- Publication number
- JPS61146944U JPS61146944U JP2808585U JP2808585U JPS61146944U JP S61146944 U JPS61146944 U JP S61146944U JP 2808585 U JP2808585 U JP 2808585U JP 2808585 U JP2808585 U JP 2808585U JP S61146944 U JPS61146944 U JP S61146944U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- wavelength
- laser light
- oscillates
- irradiates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000000862 absorption spectrum Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2808585U JPS61146944U (enExample) | 1985-03-01 | 1985-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2808585U JPS61146944U (enExample) | 1985-03-01 | 1985-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61146944U true JPS61146944U (enExample) | 1986-09-10 |
Family
ID=30525636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2808585U Pending JPS61146944U (enExample) | 1985-03-01 | 1985-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61146944U (enExample) |
-
1985
- 1985-03-01 JP JP2808585U patent/JPS61146944U/ja active Pending
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