JPS61146440A - X-y fine adjustment positioning device - Google Patents

Abstract

PURPOSE:To make highly accurate, fine positioning performable even under the inertial force action by highly adjustable speeds, by setting up each piezo- actuator in position between a movable base and a fixed based holding the former vertically in between, in X and Y directions. CONSTITUTION:A movable base 20 is set up as held vertically in between by fixed bases 21, and mounted by a ball 22 to be locked to a lower fixed base 21a. At an interval between the fixed base 21 and the movable base 20, there are provided with piezo-actuators 23 interposingly to be attached to the side of the fixed base 21. These piezo-actuators 23 are set up in both X and Y direction, while these piezo-actuator between top and bottom are set up as opposed face-to-face. The piezo-actuator 23 consists of piezo-elements 23A and 23C minutely moving in a horizontal direction and other piezo-elements 23B and 23D minutely moving in a vertical direction. In addition, the movable base 20 is connected to a hand 24 of a robot arm via rods 25 and 26.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to an XY fine positioning device used for fine positioning in high integration of semiconductors, ultra-precision machining of optical fibers, etc. This invention relates to an XY fine position positioning device suitable for fine positioning of a hand attached to the tip.

[Background of the invention]

Fine positioning is an essential technology for the high integration of semiconductors, the connection of optical fibers, and the ultra-precision processing of mechanical parts.

FIG. 4 shows an example of a conventional micro-positioning device (described in Nikkei Mechanical, No. 19814.11, P45.46).

In the figure, the coarse movement table 5 is placed on the base 1,
It is formed to be able to slide in the X and Y directions. A fine movement table 3 supported by an elastic support rod 2 is mounted on the coarse movement table 5. Between the fine movement table 3 and the coarse movement table 5, there are piezo actuators al, a#, and the like that finely move the fine movement table 3 in the X direction. A piezo actuator 4'' is provided to slightly move this in the Y direction.

A piezo actuator expands and contracts by several to several + micrometers by applying a voltage.

With the above configuration, the fine movement table 3 can be finely moved in the horizontal direction, and the piezo actuator 4'.

There were drawbacks such as difficulty in maintaining the accuracy of the connection between all, a/# and the fine movement table 3, and the occurrence of oscillation due to the elastic support rod 2 due to the action of inertia during adjustment.

FIG. 5 shows another prior art.

A piezo actuator 6.7 is connected to the table 8.9 to slightly move it. The tables 8.9 are guided by guides 10', 10', respectively, and are moved in the X and Y directions.

As shown in the figure, since the guides 10', 10' are interposed between the tables, the overall height and weight are large, making it difficult to handle.

[Purpose of the invention]

The present invention is intended to solve the above-mentioned drawbacks, and its purpose is to eliminate the problem of vibration even under the action of inertial force due to false adjustment links, to have a simple structure, to be easy to handle due to its small size, and to enable high-precision micro-positioning. An object of the present invention is to provide a fine positioning device.

[Summary of the Invention] In order to achieve the above object, the present invention arranges piezo actuators in the X and Y directions between a movable base and a fixed base sandwiching the movable base below, and The present invention is characterized by an XY fine movement position adjusting device in which the piezo actuator is formed from a group of piezo elements that are arranged vertically facing each other and are capable of fine movement in the horizontal direction and the vertical direction.

[Embodiments of the invention]

Embodiments of the present invention will be described below based on the drawings.

First, an overview of this embodiment will be explained.

As shown in FIG. 1, the movable base 20 is disposed vertically sandwiched between fixed bases 21, and the lower fixed base 21a
It is placed by a ball 22 fixed to. A piezo actuator 2S attached to the fixed base 21 side is interposed between the fixed base 21 and the movable base 20. The piezo actuators 23 are arranged in the X direction and the Y direction, and the upper and lower piezo actuators 25 are arranged facing each other. Further, as shown in FIG. 2, the piezo actuator 25 is formed of piezo elements 25A and 25C that move slightly in the horizontal direction (X direction in the figure) and piezo elements 3 and 25D that move slightly in the vertical direction.

Next, this embodiment will be explained in more detail.

As shown in FIG. 1, the fixed base 21 is formed in a U-shape, and the lower fixed base 21a and the upper fixed base 21b are arranged side by side, and the movable base 20 is arranged side by side between them. The ball 2 is mounted on the lower fixed base 21a as described above.
2 are provided at the four corners, and support the movable base 20 so as to be able to move slightly in the horizontal direction.

The piezo actuator 23 is interposed between the lower and upper fixed bases 21a, 21b and the movable base 20, and is fixed to the fixed bases 21a, 21b, respectively.

In addition, as described above, a plurality of piezo actuators 25 are arranged along the Y direction and the X direction, respectively.
are placed facing each other.

As shown in Fig. 2, each piezo actuator 2
3 is a piezo element 25 that expands and contracts in the horizontal direction, for example in the X direction.
B and a piezo element 2 that expands and contracts in the same direction and in the opposite direction.
5C and a piezo element 25 that expands and contracts in the vertical direction? ,,25
D, and each piezo element 25A, 25
B, 25C, and 25D are connected to a voltage source (not shown).

As shown in FIG. 2, the movable base 20 has a rod 25.2.
A hand 24 of a robot arm is connected via 6.

The rods 25 and 26 pass through holes 27 formed in the lower fixed base 21a.

With the above configuration, by applying a voltage to the piezo actuator 23, the movable base 20 moves to the piezo element 23A.
It is possible to make slight movements in the lx and y directions by a desired amount while being held between the objects.

Next, the operation of this embodiment will be explained.

As shown in FIG. 3(a), when a voltage is applied to the piezo elements 23A and 23AK facing each other with the movable base 20 in between, they move slightly and hold the movable base 20 between them.

In this state, no voltage is applied to the piezo elements 25B, 25C, and 23D. Therefore, the piezo element 23D is
away from

Next, as shown in FIG. 3(b), a piezo element 25B.

23C, the moving base 20 moves the piezo element 23
It moves slightly by Δ in the X direction while being held by A.

Next, as shown in FIG. 3(C), a voltage is applied to the piezo element 23D to hold the movable base 20, and as shown in FIG. 5(d), the voltage is removed from the piezo elements 23.

Here, as shown in FIG. 3(e), piezo elements 23B, 25
When the application of C is removed, the piezo elements 25B and 25C contract, and the movable base 20 moves slightly in the X direction by Δ' while being held between the piezo elements 25D. Next, as shown in FIG. 3(f), 'tlC is applied to the piezo element 25, and the moving base 20
3(g), the application to the piezo element 23D is released, and the state returns to the state shown in FIG. 3(a).

As described above, the moving base 20 is Δ+Δ'=Δ'lx
It will move slightly in the X direction.

The same thing is done in the Y direction as well.

As a result of the above, the hand 24 shown in FIG. 2 moves slightly in the XY directions.

Since the movable base 20 is held between the piezo elements 23A and the like and supported by the balls 22 as described above, there is no fear of vibrations caused by inertial force as in the prior art, and accurate minute positioning is possible.

In addition, it has a simple structure in which the piezo actuator 23 is interposed between the fixed base 21 and the movable base 20, and is small in height, compact, and lightweight.
It is a simple device that applies voltage to 23 piezo elements, etc., and is extremely easy to handle. Of course, the conventional technology (Fig. 6)
It does not require a guide mechanism, is lightweight, does not generate dust, and can be used in a clean environment.

〔Effect of the invention〕

As is clear from the above explanation, according to the present invention, high-precision minute positioning is possible without vibration even under the action of inertial force due to high acceleration/deceleration, and the structure is simple, compact, lightweight, and easy to handle. The effect of making it easier can be improved.

[Brief explanation of drawings]

FIG. 1 is a perspective view of an embodiment of the present invention, FIG. 2 is a perspective view of an embodiment of the present invention, and FIG.
3(a) to 3(g) are explanatory partial sectional views showing the operation of the embodiment, and FIGS. 4 and 5 are perspective views showing a conventional micro-positioning device. 20...Moving base, 21...Fixed base, 21a...Lower fixed base, 21b...
... Upper fixed pace, 22 ... Ball 26 ... Piezo actuator, 23A, 25
B, 23C, 25D...Piezo element, 24...
····hand.

Claims (1)

[Claims] In an XY fine positioning device that slightly moves a movable base along a horizontal plane in the X and Y directions, the movable base is disposed along the X and Y directions between the movable base and a fixed base that is disposed vertically sandwiching the movable base. and a piezo actuator arranged facing each other between the upper and lower sides, and the piezo actuator is formed from a group of piezo elements that can be slightly moved in the horizontal direction and the vertical direction.
Fine positioning device.