JPS61145236U

JPS61145236U -

Info

Publication number: JPS61145236U
Application number: JP2887585U
Authority: JP
Priority date: 1985-02-27
Filing date: 1985-02-27
Publication date: 1986-09-08
Also published as: JPH0220041Y2

Description

[Brief explanation of the drawing]

第１Ａ図および第１Ｂ図はそれぞれこの考案の
一実施例であるドラフトチヤンバを示す正面図お
よび側断面説明図、第２図は開口度センサの構成
の一例を示す説明図、第３図および第４図は第１
図のドラフトチヤンバの動作の説明図である。２……処理室、３……前面扉、４……給気フア
ン、６……排気フアン、１０……第１分岐路、１
１……第２分岐路、１２……開口度センサ、１３
……第１ダンパ、１４……第２ダンパ。 1A and 1B are a front view and a side sectional explanatory view showing a draft chamber which is an embodiment of this invention, respectively; FIG. 2 is an explanatory view showing an example of the configuration of an opening degree sensor; FIGS. Figure 4 is the first
FIG. 3 is an explanatory diagram of the operation of the draft chamber shown in the figure. 2... Processing room, 3... Front door, 4... Air supply fan, 6... Exhaust fan, 10... First branch path, 1
1... Second branch road, 12... Opening degree sensor, 13
...First damper, 14...Second damper.

Claims

[Scope of Claim for Utility Model Registration] (1) A front door that can be opened and closed at the front opening of the processing chamber, and a supply for generating airflow so as to form an air curtain along the outside of the front door. a first branching path for branching the air supplied by the air supply means and guiding it into the processing chamber; an exhaust means for exhausting the gas in the processing chamber; and an air supply for the air supply means. a second branching path for branching the air and guiding it to the exhaust means; and controlling the speed of the inflowing wind from the opening by controlling the scenery branching into the first and second branching paths, respectively. A draft chamber comprising a branch air volume control means. (2) The draft channel according to claim 1, wherein the branch air volume control means controls the air volume branched into the first and second branch paths depending on the degree of opening of the front door. Ba. (3) The branch air volume control means includes a detection means for detecting that the degree of opening of the front door has become below a predetermined value, and a detection means for controlling the air supply of the air supply means in response to a detection output of the detection means. 3. The draft chamber according to claim 2, further comprising means for branching all of the channels into the first and second branching paths. (4) further comprising: a bypass ventilation path having an inlet communicating with the outside of the processing chamber and an outlet communicating with the exhaust means; and bypass ventilation amount control means for controlling the amount of air flowing into the bypass ventilation path. A draft chamber according to claim 1 of the utility model registration claim.