JPS61144920U - - Google Patents
Info
- Publication number
- JPS61144920U JPS61144920U JP2723185U JP2723185U JPS61144920U JP S61144920 U JPS61144920 U JP S61144920U JP 2723185 U JP2723185 U JP 2723185U JP 2723185 U JP2723185 U JP 2723185U JP S61144920 U JPS61144920 U JP S61144920U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- mounting plate
- transport path
- parallel link
- positioning mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2723185U JPS61144920U (ko) | 1985-02-28 | 1985-02-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2723185U JPS61144920U (ko) | 1985-02-28 | 1985-02-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61144920U true JPS61144920U (ko) | 1986-09-06 |
Family
ID=30523982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2723185U Pending JPS61144920U (ko) | 1985-02-28 | 1985-02-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61144920U (ko) |
-
1985
- 1985-02-28 JP JP2723185U patent/JPS61144920U/ja active Pending