JPS61144637U - - Google Patents

Info

Publication number
JPS61144637U
JPS61144637U JP2878885U JP2878885U JPS61144637U JP S61144637 U JPS61144637 U JP S61144637U JP 2878885 U JP2878885 U JP 2878885U JP 2878885 U JP2878885 U JP 2878885U JP S61144637 U JPS61144637 U JP S61144637U
Authority
JP
Japan
Prior art keywords
support
substrate
pair
support rod
engaging portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2878885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128676Y2 (US07709020-20100504-C00041.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985028788U priority Critical patent/JPH0128676Y2/ja
Publication of JPS61144637U publication Critical patent/JPS61144637U/ja
Application granted granted Critical
Publication of JPH0128676Y2 publication Critical patent/JPH0128676Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Weting (AREA)
JP1985028788U 1985-02-28 1985-02-28 Expired JPH0128676Y2 (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985028788U JPH0128676Y2 (US07709020-20100504-C00041.png) 1985-02-28 1985-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985028788U JPH0128676Y2 (US07709020-20100504-C00041.png) 1985-02-28 1985-02-28

Publications (2)

Publication Number Publication Date
JPS61144637U true JPS61144637U (US07709020-20100504-C00041.png) 1986-09-06
JPH0128676Y2 JPH0128676Y2 (US07709020-20100504-C00041.png) 1989-08-31

Family

ID=30526996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985028788U Expired JPH0128676Y2 (US07709020-20100504-C00041.png) 1985-02-28 1985-02-28

Country Status (1)

Country Link
JP (1) JPH0128676Y2 (US07709020-20100504-C00041.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148640A (ja) * 1986-12-12 1988-06-21 Toshiba Corp 半導体基板の洗浄装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111320A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd スピンナ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58111320A (ja) * 1981-12-25 1983-07-02 Hitachi Ltd スピンナ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148640A (ja) * 1986-12-12 1988-06-21 Toshiba Corp 半導体基板の洗浄装置

Also Published As

Publication number Publication date
JPH0128676Y2 (US07709020-20100504-C00041.png) 1989-08-31

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