JPS61144633U - - Google Patents

Info

Publication number

JPS61144633U

JPS61144633U JP2816085U JP2816085U JPS61144633U JP S61144633 U JPS61144633 U JP S61144633U JP 2816085 U JP2816085 U JP 2816085U JP 2816085 U JP2816085 U JP 2816085U JP S61144633 U JPS61144633 U JP S61144633U

Authority

JP

Japan

Prior art keywords

susceptor

container

recess

positioning

semiconductor wafer

Prior art date

1985-02-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
• 229910052799 carbon Inorganic materials 0.000 claims description 2
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
• 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• 238000010438 heat treatment Methods 0.000 claims 1
• 230000006698 induction Effects 0.000 claims 1

Cited By (2)