JPS61142867U - - Google Patents
Info
- Publication number
- JPS61142867U JPS61142867U JP2409385U JP2409385U JPS61142867U JP S61142867 U JPS61142867 U JP S61142867U JP 2409385 U JP2409385 U JP 2409385U JP 2409385 U JP2409385 U JP 2409385U JP S61142867 U JPS61142867 U JP S61142867U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- shutter
- guide groove
- sputtering
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2409385U JPS61142867U (enExample) | 1985-02-20 | 1985-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2409385U JPS61142867U (enExample) | 1985-02-20 | 1985-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142867U true JPS61142867U (enExample) | 1986-09-03 |
Family
ID=30517926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2409385U Pending JPS61142867U (enExample) | 1985-02-20 | 1985-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142867U (enExample) |
-
1985
- 1985-02-20 JP JP2409385U patent/JPS61142867U/ja active Pending
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